Fracture toughness of polysilicon MEMS devices

Sensors and Actuators, A: Physical

Volumn 82, Issue 1, 2000, Pages 274-280

  Kahn, H ^a   Tayebi, N ^a   Ballarini, R ^a   Mullen, R L ^a   Heuer, A H ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK PROPAGATION; ELECTROSTATIC DEVICES; FINITE ELEMENT METHOD; FRACTURE MECHANICS; FRACTURE TOUGHNESS; MICROACTUATORS; MICROMACHINING; SEMICONDUCTING SILICON;

POLYSILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 0033749085     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00366-0     Document Type: Article

References (14)

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