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Volumn 71, Issue 1-2, 1998, Pages 74-80

Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)

Author keywords

Electrostatics; Insulators; Micromechanics; Silicon nitride; Silicon oxide; Surface charges

Indexed keywords

ELECTRIC CHARGE; ELECTROSTATICS; MICROACTUATORS; MICROSENSORS; SILICA; SILICON NITRIDE; SILICON SENSORS;

EID: 0032208481     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00155-1     Document Type: Article
Times cited : (279)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.