Simulation studies on nonlinear dynamics and chaos in a MEMS cantilever control system

Journal of Micromechanics and Microengineering

Volumn 14, Issue 7, 2004, Pages 1064-1073

  Liu, S ^a   Davidson, A ^b   Lin, Q ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CHAOS THEORY; COMPUTER SIMULATION; DIFFERENTIAL EQUATIONS; DYNAMICS; ELECTRIC FIELD EFFECTS; ELECTROSTATICS; MAGNETIC FIELD EFFECTS; MICROPROCESSOR CHIPS; SERVOMECHANISMS;

CANTILEVER SYSTEMS; CELESTIAL MECHANICS; CIRCUIT ELEMENTS; ELECTRIC FORCES;

MICROELECTROMECHANICAL DEVICES;

EID: 3142737859     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/7/029     Document Type: Article

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