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Volumn 29, Issue 8, 2007, Pages 841-844
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Air damping in micro-beam resonators
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Author keywords
Air damping; Micro beam resonator; Quality factor; Resonant frequency
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Indexed keywords
AIR;
ASPECT RATIO;
BEAMS AND GIRDERS;
DAMPING;
FILM THICKNESS;
RESONANCE;
VIBRATIONS (MECHANICAL);
AIR DAMPING;
MICROBEAM RESONATOR;
QUALITY FACTOR;
RESONANT FREQUENCY;
RESONATORS;
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EID: 34648835070
PISSN: 1001053X
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (4)
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References (13)
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