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Volumn 29, Issue 8, 2007, Pages 841-844

Air damping in micro-beam resonators

Author keywords

Air damping; Micro beam resonator; Quality factor; Resonant frequency

Indexed keywords

AIR; ASPECT RATIO; BEAMS AND GIRDERS; DAMPING; FILM THICKNESS; RESONANCE; VIBRATIONS (MECHANICAL);

EID: 34648835070     PISSN: 1001053X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (4)

References (13)
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    • in Chinese
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    • 2nd ed. New York: McGraw-Hill
    • White F M. Viscous Fluid Flow. 2nd ed. New York: McGraw-Hill, 1974: 357
    • (1974) Viscous Fluid Flow , pp. 357
    • White, F.M.1
  • 8
    • 0002963056 scopus 로고
    • An expansion formula for the drag on a circular cylinder moving through a viscous fluid at small Reynolds number
    • Tomotika S, Aoi T. An expansion formula for the drag on a circular cylinder moving through a viscous fluid at small Reynolds number. J Mech Appl Math, 1951, 4: 401
    • (1951) J Mech Appl Math , vol.4 , pp. 401
    • Tomotika, S.1    Aoi, T.2
  • 9
    • 0025559263 scopus 로고    scopus 로고
    • Squeeze-film damping in solid state accelerometers
    • Hilton Head Island
    • Starr J B. Squeeze-film damping in solid state accelerometers//Proc IEEE Solid State Sensors Workshop. Hilton Head Island, 1996: 44
    • (1996) Proc IEEE Solid State Sensors Workshop , pp. 44
    • Starr, J.B.1
  • 11
    • 85037491402 scopus 로고
    • The influence of the molecular mean free path on the performance of hydrodynamic gas lubricated bearings
    • Burgdorfer A. The influence of the molecular mean free path on the performance of hydrodynamic gas lubricated bearings. J Basic Eng Trans, 1959, 3(81): 94
    • (1959) J Basic Eng Trans , vol.3 , Issue.81 , pp. 94
    • Burgdorfer, A.1
  • 12
    • 27144494551 scopus 로고    scopus 로고
    • Analytical solutions for the stiffness and damping coefficients of squeeze-films in MEMS devices with perforated back plates
    • Mohite S S, Kesari H, Sonti V R, et al. Analytical solutions for the stiffness and damping coefficients of squeeze-films in MEMS devices with perforated back plates. J Micromech Microeng, 2005, 15: 2083
    • (2005) J Micromech Microeng , vol.15 , pp. 2083
    • Mohite, S.S.1    Kesari, H.2    Sonti, V.R.3
  • 13
    • 0035424265 scopus 로고    scopus 로고
    • Resonant accelerometer with self-test
    • Aikele M, Bauer K, Ficker W, et al. Resonant accelerometer with self-test. Sens Actuators A, 2001, 92: 161
    • (2001) Sens Actuators A , vol.92 , pp. 161
    • Aikele, M.1    Bauer, K.2    Ficker, W.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.