The pull-in behavior of electrostatically actuated bistable microstructures

Journal of Micromechanics and Microengineering

Volumn 18, Issue 5, 2008, Pages

  Krylov, Slava ^a   Ilic, Bojan R ^b   Schreiber, David ^a   Seretensky, Shimon ^a   Craighead, Harold ^b  

^a TEL AVIV UNIVERSITY   (Israel)

^b Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELECTROSTATIC FORCE; NUMERICAL ANALYSIS; OPTICAL DEVICES; SILICON ON INSULATOR TECHNOLOGY; VOLTAGE MEASUREMENT;

CRITICAL VOLTAGE; ELECTROSTATICALLY ACTUATED BISTABLE MICROSTRUCTURES; SILICON ON INSULATOR (SOI) WAFERS; VOLTAGE-DEFLECTION;

MICROSTRUCTURE;

EID: 42949138742     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/5/055026     Document Type: Article

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