Linear, nonlinear and mixed-regime analysis of electrostatic MEMS

Sensors and Actuators, A: Physical

Volumn 90, Issue 3, 2001, Pages 278-291

  Li, G ^a   Aluru, N R ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Electrostatic MEMS; Linear and nonlinear theories; Meshless method; Mixed regime approach

Indexed keywords

APPROXIMATION THEORY; COMPUTER SIMULATION; DEFORMATION; ELASTICITY; ELECTROSTATIC DEVICES; GREEN'S FUNCTION; INTERPOLATION; PARTIAL DIFFERENTIAL EQUATIONS; ELECTRIC POTENTIAL; ELECTROSTATICS; LINEAR SYSTEMS; NONLINEAR SYSTEMS;

ELECTROSTATIC MICROELECTROMECHANICAL SYSTEMS; FINITE CLOUD METHOD; MESHLESS METHODS; MIXED REGIME APPROACH;

MICROELECTROMECHANICAL DEVICES;

MESHLESS METHOD; MIXED-REGIME ANALYSIS;

EID: 0035880218     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0924-4247(01)00597-0     Document Type: Article

References (13)

1. An efficient numerical technique for electromechanical simulation of complicated microelectromechanical structures
2. 3-D coupled electromechanics for MEMS: Applications of CoSolve-EM
3. A quadratic method for nonlinear model order reduction
4. Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs
5. Finite cloud method: A true meshless technique based on a fixed reproducing Kernel approximation
6. A point collocation method based on reproducing Kernel approximations
7. A reproducing Kernel particle method for meshless analysis of microelectromechanical systems
8. Finite element formulations for large deformation dynamic analysis
9. M-test: A test chip for MEMS material property measurement using electrostatically actuated test structures
10. A multilevel Newton method for mixed-energy domain simulation of MEMS