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Volumn 11, Issue 3, 2002, Pages 276-283

A dynamic model, including contact bounce, of an electrostatically actuated microswitch

Author keywords

Dynamic model; Microrelay; Microswitch; Switch bounce

Indexed keywords

COMPUTER SIMULATION; ELECTRIC SWITCHES; FIELD EFFECT TRANSISTORS; MICROELECTROMECHANICAL DEVICES; NETWORKS (CIRCUITS);

EID: 0036600512     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.1007406     Document Type: Article
Times cited : (225)

References (9)
  • 4
    • 0032141012 scopus 로고    scopus 로고
    • CAD challenges for microsensors, microactuators, and microsystems
    • Aug.
    • (1998) Proc. IEEE , vol.86 , pp. 1611-1626
    • Senturia, S.D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.