Dynamic pull-in phenomenon in MEMS resonators

Nonlinear Dynamics

Volumn 48, Issue 1-2, 2007, Pages 153-163

  Nayfeh, Ali H ^a   Younis, Mohammad I ^b   Abdel Rahman, Eihab M ^c  

^a Virginia Polytechnic Institute and State University   (United States)

^b State University of New York at Binghamton   (United States)

^c UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Electric actuation; MEMS; Microbeams; Primary resonance; Pull in; Resonators

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC POTENTIAL; MICROELECTROMECHANICAL DEVICES; PROBLEM SOLVING;

ELECTRIC ACTUATION; MICROBEAMS; PRIMARY RESONANCE; RESONANT SENSORS;

RESONATORS;

EID: 33846559280     PISSN: 0924090X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11071-006-9079-z     Document Type: Article

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