A three-scale FE approach to reliability analysis of MEMS sensors subject to impacts

Meccanica

Volumn 43, Issue 5, 2008, Pages 469-483

  Mariani, Stefano ^a   Ghisi, Aldo ^a   Fachin, Fabio ^a   Cacchione, Fabrizio ^a   Corigliano, Alberto ^a   Zerbini, Sarah ^b  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

Drop impacts; Micro mechanics; Multi scale FE analysis; Polysilicon MEMS sensors; Shocks

Indexed keywords

COMPOSITE MICROMECHANICS; FINITE ELEMENT METHOD; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; POLYSILICON; RELIABILITY ANALYSIS; SENSOR NETWORKS; SENSORS;

DROP IMPACTS; MICRO-MECHANICS; MULTI-SCALE FE ANALYSIS; POLYSILICON MEMS SENSORS; SHOCKS;

RELIABILITY;

EID: 53549100494     PISSN: 00256455     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11012-008-9111-0     Document Type: Article

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