Stability, nonlinearity and reliability of electrostatically actuated MEMS devices

Sensors

Volumn 7, Issue 5, 2007, Pages 760-796

  Zhang, Wen Ming ^a   Meng, Guang ^a   Chen, Di ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Electrostatic force; MEMS; Nonlinearity; Reliability; Scaling effect; Stability

Indexed keywords

CONVERGENCE OF NUMERICAL METHODS; ELECTROSTATIC ACTUATORS; ELECTROSTATIC FORCE; ELECTROSTATICS; MEMS; RELIABILITY; RELIABILITY ANALYSIS; STABILITY; STIFFNESS;

FAILURE MODES AND MECHANISMS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); NONLINEAR CHARACTERISTICS; NONLINEARITY; PARALLEL PLATE CAPACITORS; PRACTICAL IMPORTANCE; SCALING EFFECTS; SENSING AND ACTUATING;

ELECTROSTATIC DEVICES;

EID: 34249900757     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s7050760     Document Type: Article

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