-
1
-
-
0031168990
-
M-TEST: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures
-
Osterberg, P. M. and Senturia, S. D., "M-TEST: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures," Journal of Microelectromechanical Systems, Vol. 6, pp. 107-118 (1997).
-
(1997)
Journal of Microelectromechanical Systems
, vol.6
, pp. 107-118
-
-
Osterberg, P.M.1
Senturia, S.D.2
-
2
-
-
0003894003
-
Electrostatic Pull-in Test Structures Design for in-situ Mechanical Property Measurement of Microelectromechanical Systems (MEMS),
-
Ph.D. Dissertation, MIT, MA, USA
-
Gupta, R. K., "Electrostatic Pull-in Test Structures Design for in-situ Mechanical Property Measurement of Microelectromechanical Systems (MEMS)," Ph.D. Dissertation, MIT, MA, USA (1997).
-
(1997)
-
-
Gupta, R.K.1
-
3
-
-
2142667060
-
Some Design Considerations on the Electrostatically Actuated Microstructures
-
Hu, Y. C., Chang, C. M. and Huang, S. C., "Some Design Considerations on the Electrostatically Actuated Microstructures," Sensors and Actuators A: Physical Vol. 112, pp. 155-161 (2004).
-
(2004)
Sensors and Actuators A: Physical
, vol.112
, pp. 155-161
-
-
Hu, Y.C.1
Chang, C.M.2
Huang, S.C.3
-
4
-
-
34547209457
-
On the Dynamic and Stability Analysis of Electrostatically Actuated Microstructures
-
Honolulu, Hawaii, 2-01
-
Hu, Y. C., Wang, Y. H. and Huang, S. C., "On the Dynamic and Stability Analysis of Electrostatically Actuated Microstructures," Proceedings of the 1st International Symposium on Micro & Nano Technology (ISMNT-1), Honolulu, Hawaii, Vol. III-2-01 (2004).
-
(2004)
Proceedings of the 1st International Symposium on Micro & Nano Technology (ISMNT-1)
, vol.3
-
-
Hu, Y.C.1
Wang, Y.H.2
Huang, S.C.3
-
5
-
-
28644431585
-
Non-Linear and Linearized Algorithms for the Young's Modulus Extraction of Thin Films through the C-V measurement of Microstructures
-
Hu, Y. C. and Tu, W. H., "Non-Linear and Linearized Algorithms for the Young's Modulus Extraction of Thin Films through the C-V measurement of Microstructures," Journal of Applied Physics, Vol. 98, p. 104504 (2005).
-
(2005)
Journal of Applied Physics
, vol.98
, pp. 104504
-
-
Hu, Y.C.1
Tu, W.H.2
-
6
-
-
0027989013
-
Self-Consistent Simulation and Modeling of Electrostatically Deformed Diaphragms
-
94 Workshop, Osio, Japan, pp
-
Osterberg, P., Yie, H., Cai, X., White, J. and Senturia, S. D., "Self-Consistent Simulation and Modeling of Electrostatically Deformed Diaphragms," Proceedings of the IEEE MEMS'94 Workshop, Osio, Japan, pp. 28-32 (1994).
-
(1994)
Proceedings of the IEEE MEMS
, pp. 28-32
-
-
Osterberg, P.1
Yie, H.2
Cai, X.3
White, J.4
Senturia, S.D.5
-
7
-
-
0036646594
-
Pull-in Voltage Analysis of Electrostatically Actuated Beam Structures with Fixed-Fixed and Fixed-Free End Conditions
-
Pamidighantam, S., Puers, R., Baert, K. and Tilmans, H. A. C., "Pull-in Voltage Analysis of Electrostatically Actuated Beam Structures with Fixed-Fixed and Fixed-Free End Conditions," Journal of Micromechanics and Microengineering, Vol. 12, pp. 458-464 (2002).
-
(2002)
Journal of Micromechanics and Microengineering
, vol.12
, pp. 458-464
-
-
Pamidighantam, S.1
Puers, R.2
Baert, K.3
Tilmans, H.A.C.4
-
8
-
-
0942268413
-
Analytical and Finite Element Model Pull-in Study of Rigid and Deformable Electrostatic Microactuators
-
Cheng, J., Zhe, J. and Wu, X., "Analytical and Finite Element Model Pull-in Study of Rigid and Deformable Electrostatic Microactuators," Journal of Micromechanics and Microengineering, Vol. 14, pp. 57-68 (2004).
-
(2004)
Journal of Micromechanics and Microengineering
, vol.14
, pp. 57-68
-
-
Cheng, J.1
Zhe, J.2
Wu, X.3
-
9
-
-
17444404224
-
A Closed-Form Model for the Pull-in Voltage of Electrostatically Actuated Cantilever Beams
-
Chowdhery, S., Ahmadi, M. and Miller, W. C., "A Closed-Form Model for the Pull-in Voltage of Electrostatically Actuated Cantilever Beams," Journal of Micromechanics and Microengineering, Vol. 15, pp. 756-763 (2005).
-
(2005)
Journal of Micromechanics and Microengineering
, vol.15
, pp. 756-763
-
-
Chowdhery, S.1
Ahmadi, M.2
Miller, W.C.3
-
10
-
-
34547182618
-
Mechanical Behavior of RF MEMS
-
Chiba University, Japan, pp
-
Lin, H. H., Chu, C. H., Chang, C. L. and Chang, P. Z., "Mechanical Behavior of RF MEMS," Proceedings of the Second International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems, Chiba University, Japan, pp. 121-125 (2004).
-
(2004)
Proceedings of the Second International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems
, pp. 121-125
-
-
Lin, H.H.1
Chu, C.H.2
Chang, C.L.3
Chang, P.Z.4
-
11
-
-
0018029736
-
Dynamic Micromechanics on Silicon Techniques and Devices
-
Petersen, K. E., "Dynamic Micromechanics on Silicon Techniques and Devices," IEEE Transactions on Electron Devices, Vol. ED-25, pp. 1241-1250 (1978).
-
(1978)
IEEE Transactions on Electron Devices
, vol.ED-25
, pp. 1241-1250
-
-
Petersen, K.E.1
-
12
-
-
84864652090
-
Analytical Modeling for Determination of Pull-in Voltage for an Electrostatic Actuated MEMS Cantilever Beam
-
Orlando, Florida, USA, pp
-
Wei, L. C., Mohammad, A. B. and Kassim, N. M., "Analytical Modeling for Determination of Pull-in Voltage for an Electrostatic Actuated MEMS Cantilever Beam," Proceedings of the IEEE ISCE 2002, Orlando, Florida, USA, pp. 233-238 (2002).
-
(2002)
Proceedings of the IEEE ISCE 2002
, pp. 233-238
-
-
Wei, L.C.1
Mohammad, A.B.2
Kassim, N.M.3
-
13
-
-
0031235120
-
Electrostatic Curved Electrode Actuators
-
Legtenberg, R., Gilbert, J., Senturia, S. D. and Elwenspoek, M., "Electrostatic Curved Electrode Actuators," Journal of Microelectromechanical Systems, Vol. 6, pp. 257-265 (1997).
-
(1997)
Journal of Microelectromechanical Systems
, vol.6
, pp. 257-265
-
-
Legtenberg, R.1
Gilbert, J.2
Senturia, S.D.3
Elwenspoek, M.4
-
14
-
-
0034270476
-
Analysis of Partly Corrugated Rectangular Diaphragms Using the Rayleigh-Ritz Method
-
Lee, B. C. and Kim, E. S., "Analysis of Partly Corrugated Rectangular Diaphragms Using the Rayleigh-Ritz Method," Journal of Microelectromechanical Systems, Vol. 9, pp. 399-406 (2000).
-
(2000)
Journal of Microelectromechanical Systems
, vol.9
, pp. 399-406
-
-
Lee, B.C.1
Kim, E.S.2
-
15
-
-
3142665401
-
Reducedorder Modeling of Weakly Nonlinear MEMS Devices with Taylor-series Expansion and Arnoldi Approach
-
Chen, J., Kang, S. M., Zou, J. and Liu, C., "Reducedorder Modeling of Weakly Nonlinear MEMS Devices with Taylor-series Expansion and Arnoldi Approach," Journal of Microelecrtomechanical Systems, Vol. 13, pp. 441-451 (2004).
-
(2004)
Journal of Microelecrtomechanical Systems
, vol.13
, pp. 441-451
-
-
Chen, J.1
Kang, S.M.2
Zou, J.3
Liu, C.4
-
16
-
-
24144471542
-
Fringing Field Effect in Electrostatic Actuators, Israel Institute of Technology
-
Technical Report ETR-2004-2
-
Leus, V. and Elata, D., Fringing Field Effect in Electrostatic Actuators, Israel Institute of Technology, Technical Report ETR-2004-2 (2004).
-
(2004)
-
-
Leus, V.1
Elata, D.2
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