Pull-in study for round double-gimbaled electrostatic torsion actuators

Journal of Micromechanics and Microengineering

Volumn 12, Issue 1, 2002, Pages 77-81

  Xiao, Zhixiong ^a   Peng, Wuyong ^a   Wu, XingTao ^a   Farmer, K R ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATICS; FINITE ELEMENT METHOD; OPTICAL INTERCONNECTS; TORQUE;

ELECTROSTATIC TORSION ACTUATOR; INNER ROUND PLATE; PULL-IN EFFECT; SOFTWARE PACKAGE MEMCAD; TORSION-MODE DOMINANT SYSTEM; VARIABLE LENGTH ELECTRODE;

ACTUATORS;

EID: 0036153067     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/1/312     Document Type: Article

References (12)

1. The future of MEMS in telecommunications networks
2. Electrostatic aluminum micromirrors using double-pass metallization
3. Electrostatic micro torsion mirrors for an optical switch matrix
4. Design and fabrication of micromirror supported by electroplated nickel posts
5. Micro-opto-mechanical devices fabricated by anisotropic etching of (110) silicon
6. Electrostatically deflectable polysilicon micromirrors-Dynamic behavior and comparison with results from FEM modeling with ANSYS
7. Deformable-mirror spatial light modulators
8. Electrostatically actuated micromechanical test structures for material property measurements
9. Electrostatic pull-in test design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)
10. Pull-in study of an electrostatic torsion microactuator
11. An angle based design approach for rectangular electrostatic torsion actuators