Optimal shape design of an electrostatic comb drive in microelectromechanical systems

Journal of Microelectromechanical Systems

Volumn 7, Issue 1, 1998, Pages 16-26

  Ye, Wenjing ^b,d,e   Mukherjee, Subrata ^b,f,g,h,i   MacDonald, Noel C ^{a,c,j,k,l,m,n,o}  

^a IEEE

^b Department of Obstetrics Gynecology   (United States)

^c Cornell University   (United States)

^d UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^e UNIVERSITY OF CALIFORNIA   (United States)

^f INDIAN INSTITUTE OF TECHNOLOGY   (India)

^g STANFORD UNIVERSITY   (United States)

^h ASME   (United States)

ⁱ American Academy of Mechanics   (United States)

^j UNIVERSITY OF CALIFORNIA   (United States)

^k UNIVERSITY OF CALIFORNIA   (United States)

^l ROCKWELL SCIENCE CENTER   (United States)

^m Phys Electronics Industries Inc

ⁿ PERKINELMER INC   (United States)

^o Department of Theoretical and Applied Mechanics and the Cornell Nanofabrication Facility   (United States)

more..

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BOUNDARY ELEMENT METHOD; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; DIFFERENTIATION (CALCULUS); ELECTRIC DRIVES; ELECTROSTATIC DEVICES; ITERATIVE METHODS; OPTIMIZATION;

DESIGN SENSITIVITY COEFFICIENTS (DSC); DIRECT DIFFERENTIATION APPROACH (DDA); ELECTROSTATIC ACTUATORS; ELECTROSTATIC COMB DRIVES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032022531     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.661380     Document Type: Article

References (21)

1. H. H. Woodson and J. R. Melcher, Electromechanical Dynamics. New York: Wiley, 1968.
2. W. C. Tang, T. H. Nguyen, M. W. Judy, and R. T. Howe, "Electrostaticcomb drive of lateral polysilicon resonators," Sens. Actuators A, vol. 21-23, pp. 328-331, 1990.
3. J. C. Greenwood, "Integrated fabrication of micromechanical structures on silicon," Novel Silicon Based Technologies. Dordrecht, The Netherlands: Kluwer, 1991, pp. 123-141.
4. M. G. Lim, J. C. Chang, D. P. Schultz, R. T. Howe, and R. M. White, "Polysilicon microstructures to characterize static friction," in Proc. IEEE Micro-Electro-Mechanical Syst. Workshop. Napa Valley, CA, 1990, pp. 9-14.
5. C. J, Kim, A. P. Pisano, R. S. Muller, and M. G. Lim, "Polysilicon microgripper," in Tech. Dig. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, 1990, pp. 48-51.
6. W. Yun, R. T. Howe, and P. R. Gray, "Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry," in Tech. Dig. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, 1992, pp. 126-131.
7. A. P. Pisano, "Resonant-structure micromotors," in Proc. IEEE MicroElectro-Mechanical Syst. Workshop, Napa Valley, CA, 1989, pp. 1-8.
8. F. Shi, "Simulation and analysis of micro-electro-mechanical systems with applications of sensitivity analysis and optimization," Ph.D dissertation. Cornell Univ., Ithaca, NY, 1995.
9. S. Adams, "Design of electrostatic actuators to tune the effective stiffness of micro-electro-mechanical systems," Ph.D dissertation, Cornell Univ., Ithaca, NY, 1996.
10. S. D. Senturia, "CAD for microelectromechanical systems," in Proc. 8th Int. Conf.Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden, vol. 2, 1995, pp. 5-8.
11. J. R. Gilbert, R. Legtenberg, and S. D. Senturia, "3D coupled electromechanics for MEMS: Applications of CoSolve-EM," in Proc. IEEE Workshop on MEMS, Amsterdam, The Netherlands, 1995, pp. 122-127.
12. J. R. Gilbert, G. K. Ananthasuresh, and S. D. Senturia, "3D modeling of contact problems and hysteresis in coupled electro-mechanics," in Proc. IEEE 9th Annu. Int. Workshop on Micro Electro Mechanical Syst., 1996, pp. 127-132.
13. Y. He, R. Harris, G. Napadenski, and F. Maseeh, "A virtual prototype manufacturing software system for MEMS," in Proc. IEEE 9th Annu. Int. Workshop on Micro Electro Mechanical Syst., 1996, pp. 122-126.
14. E. J. Haug, K. K. Choi, and V. Komkov, Design Sensitivity Analysis of Structural Systems. New York: Academic, 1986.
15. Q. Zhang and S. Mukherjee, "Design sensitivity coefficients for linear elastic bodies with zones and corners by the derivative boundary element method," Int. J. Solids Structures, vol. 27, pp. 983-998, 1991.
16. F. Shi, S. Mukherjee, and P. Ramesh, "Sensitivity analysis and optimal design in charge transport problems," Int. J. Numer. Methods Eng., vol. 37, pp. 1445-1464, 1994.
17. User's Manual, IMSL Math/Library, IMSL, Houston, TX, 1989.
18. J. D. Jackson, Classical Electrodynamics, 2nd ed. Singapore: Wiley, 1975.
19. F. Shi, P. Ramesh, and S. Mukherjee, "On the application of 2D potential theory to electrostatic simulation," Commun. Numer. Meth. Eng., vol. 11, pp. 691-701, 1995.
20. A. Chandra and S. Mukherjee, Boundary Element Methods in Manufacturing. Oxford, UK: Oxford Univ. Press, 1997.
21. J. A. McMillan, "High frequency mechanical resonant devices," Ph.D dissertation, Cornell Univ., Ithaca, NY, 1993.