On the dynamic response of electrostatic MEMS switches

Journal of Microelectromechanical Systems

Volumn 17, Issue 1, 2008, Pages 236-243

  Leus, Vitaly ^a   Elata, David ^a,b  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b Stanford University   (United States)

Author keywords

Dynamic pull in; Dynamic response; Electrostatic actuators; Electrostatic switches

Indexed keywords

DYNAMIC RESPONSE; MEMS; SWITCHES;

DYNAMIC PULL-IN; ELECTROSTATIC SWITCHES; STEP-FUNCTION VOLTAGE;

ELECTROSTATIC ACTUATORS;

EID: 40449111712     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.908752     Document Type: Article

References (25)

1. S. D. Senturia, Microsystem Design. Boston, MA: Kluwer, 2001.
2. J. A. Pelesko and D. H. Bernstein, Modeling MEMS and NEMS. Boca Raton, FL: CRC Press, 2003.
3. O. Solgaard, F. S. A. Sandejas, and D. M. Bloom, "Deformable grating optical modulator," Opt. Lett., vol. 17, no. 9, pp. 688-690, May 1992.
4. L. J. Hornbeck, "The DMD (TM) projection display chip: A MEMS-based technology," MRS Bull., vol. 26, pp. 325-327, 2001.
5. K. E. Petersen, "Micromechanical membrane switches on silicon," IBM J. Res. Develop., vol. 23, no. 4, pp. 376-385, 1979.
6. R. E. Mihailovich, M. Kim, J. B. Hacker, E. A. Sovero, J. Studer, J. A. Higgins, and J. E. DeNatale, "MEM relay for reconfigurable RF circuits," IEEE Microw. Wireless Compon. Lett., vol. 11, no. 2, pp. 53-55, Feb. 2001.
7. J. Y. Park, G. H. Kim, K. W. Chung, and J. U. Bu, "Monolithically integrated micromachined RF MEMS capacitive switches," Sens. Actuators A, Phys., vol. 89, no. 1/2, pp. 88-94, Mar. 2001.
8. H. J. De Los Santos, RF MEMS Circuit Design for Wireless Communications. Boston, MA: Artech House, 2002.
9. M. Rebeiz, RF MEMS: Theory, Design, and Technology. Hoboken, NJ: Wiley-Interscience, 2003.
10. D. Elata and H. Bamberger, "A lower bound for the dynamic pull-in of electrostatic actuators," in Proc. Eur. Micro Nano Syst., Paris, France, 2004, pp. 83-85.
11. D. Elata and H. Bamberger, "On the dynamic pull-in of electrostatic actuators with multiple degrees of freedom and multiple voltage sources," J. Microelectromech. Syst., vol. 15, no. 1, pp. 131-140, Feb. 2006.
12. F. Pan, J. Kubby, E. Peeters, A. T. Tran, and S. Mukherjee, "Squeeze film damping effect on the dynamic response of a MEMS torsion mirror," J. Micromech. Microeng., vol. 8, no. 3, pp. 200-208, Sep. 1998.
13. E. S. Hung and S. D. Senturia, "Generating efficient dynamical models for microelectromechartical systems from a few finite-element simulation runs," J. Microelectromech. Syst., vol. 8, no. 3, pp. 280-289, Sep. 1999.
14. R. K. Gupta and S. D. Senturia, "Pull-in time dynamics as a measure of absolute pressure," in Proc. MEMS, Nagoya, Japan, 1997, pp. 290-294.
15. S. J. Wong, C. H. J. Fox, S. McWilliam, C. P. Fell, and R. Eley, "A preliminary investigation of thermo-elastic damping in silicon rings," J. Micromech. Microeng., vol. 14, no. 9, pp. S108-S113, Sep. 2004.
16. E. K. Chan, E. C. Kan, R. W. Dutton, and P. M. Pinsky, "Nonlinear dynamic modeling of micromachined microwave switches," in Proc. IEEE MTT-S Int. Microw. Symp., Denver, CO, 1997, pp. 1511-1514.
17. L. D. Gabbay, J. E. Mehner, and S. D. Senturia, "Computer-aided generation of nonlinear reduced-order dynamic macromodels - I: Non-stress-stiffened case," J. Microelectromech. Syst., vol. 9, no. 2, pp. 262-269, Jun. 2000.
18. J. E. Mehner, L. D. Gabbay, and S. D. Senturia, "Computer-aided generation of nonlinear reduced-order dynamic macromodels II: Stress-stiffened case," J. Microelectromech. Syst., vol. 9, no. 2, pp. 270-278, Jun. 2000.
19. M. I. Younis, E. M. Abdel-Rahman, and A. Nayfeh, "A reduced-order model for electrically actuated microbeam-based MEMS," J. Microelectromech. Syst., vol. 12, no. 5, pp. 672-680, Oct. 2003.
20. L. A. Rocha, E. Cretu, and R. F. Wolffenbuttel, "Behavioural analysis of the pull-in dynamic transition," J. Micromech. Microeng., vol. 14, no. 9, pp. S37-S42, Sep. 2004.
21. MATLAB. [Online]. Available: httpp://www.mathworks.com/
22. R. Lifshitz and M. L. Roukes, "Thermoelastic damping in micro- and nanomechanical systems," Phys. Rev. B, Condens. Matter, vol. 61, no. 8, pp. 5600-5609, Feb. 2000.
23. P. G. Steeneken, I G. S. M. Rijks, J. T. M. van Beek, M. J. E. Ulenaers, J. De Coster, and R. Puers, "Dynamics and squeeze film gas damping of a capacitive RF MEMS switch," J. Micromech. Microeng., vol. 15, no. 1, pp. 176-184, Jan. 2005.
24. D. A. Czaplewski, C. W. Dyck, H. Sumali, J. E. Massad, J. D. Kuppers, I. Reines, W. D. Cowan, and C. P. Tigges, "A soft-landing waveform for actuation of a single-pole single-throw ohmic RF MEMS switch," J. Microelectromech. Syst., vol. 15, no. 6, pp. 1586-1594, Dec. 2006.
25. V. Leus, A. Hirshberg, and D. Elata, "Optimizing the dynamic response of RF MEMS switches using tailored voltage pulses," in Proc. Thermal, Mech. Multi-Phys. Simul. Experiments Microelectron. Micro-Syst., Int. Conf. EuroSime, 2007, pp. 1-4.