Dynamic response modelling and characterization of a vertical electrothermal actuator

Journal of Micromechanics and Microengineering

Volumn 19, Issue 7, 2009, Pages

  Li, Lijie ^a   Uttamchandani, Deepak ^a  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

A-THERMAL; CUBIC STIFFNESS; DESIGNING CONTROL SYSTEM; DRIVING CONDITIONS; DYNAMIC BEHAVIOURS; DYNAMIC PERFORMANCE; ELECTRO-THERMAL ACTUATORS; ELECTROTHERMAL ACTUATION; ELECTROTHERMAL MODELLING; LASER VIBROMETERS; MATHEMATICAL MODELLING; MECHANICAL CONSTRAINTS; MECHANICAL DYNAMIC EQUATION; MICROELECTROMECHANICAL SYSTEMS; ONE-DIMENSIONAL HEAT; PIECE-WISE; RESONANT FREQUENCIES; RISETIMES; RUNGE-KUTTA ALGORITHMS; SECOND-ORDER ORDINARY DIFFERENTIAL EQUATIONS; SECOND-ORDER PARTIAL DIFFERENTIAL EQUATION; SIMULATION RESULT; SINGLE CRYSTAL SILICON; TEMPERATURE DEPENDENCE; THERMAL CONDUCTION; THERMAL LOSS; THERMAL RESPONSE; THERMAL-MECHANICAL MODELLING;

DYNAMIC RESPONSE; DYNAMICS; ELECTRIC HEATING; ELECTROSTATIC ACTUATORS; MEMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; ORDINARY DIFFERENTIAL EQUATIONS; RADIATION EFFECTS; RUNGE KUTTA METHODS; SILICON WAFERS; SIMULATORS; SINGLE CRYSTALS; THERMAL CONDUCTIVITY;

MATHEMATICAL MODELS;

EID: 68249140386     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/7/075014     Document Type: Article

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