Pull-in time-energy product of electrostatic actuators: Comparison of experiments with simulation

Sensors and Actuators, A: Physical

Volumn 83, Issue 1, 2000, Pages 263-269

  Castaner L ^a   Rodriguez A ^a   Pons, J ^a   Senturia, S D ^b  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER HARDWARE DESCRIPTION LANGUAGES; COMPUTER SIMULATION; COMPUTER SYSTEMS PROGRAMMING; ELECTRIC CURRENT CONTROL; ELECTROSTATIC DEVICES; ENERGY UTILIZATION; MATHEMATICAL MODELS; VOLTAGE CONTROL;

ELECTROSTATIC MICROACTUATORS; PULL-IN TIME-ENERGY PRODUCTS; SOFTWARE PACKAGE SABER;

MICROACTUATORS;

EID: 0342906551     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00394-5     Document Type: Article

References (6)

1. H. Fujita, A. Omodaka, Electrostatic actuators for micromechatronics, Proc. of the IEEE International Workshop on Microelectromechanical Systems (MEMS '97), reprinted in W.S. Trimmer (Ed.), Micromechanics and MEMS, IEEE Press, 1996, pp. 276-285.
2. Puers R., Bienstman J., Vandewalle J. The autonomous impact resonator: a new operation principle for a silicon strain gauge. Proc. of the International Conference on Solid-State Sensors and Actuators (Transducers '97), Chicago, June. 1997;1105-1108 IEEE.
3. Castañer L., Senturia S.D. Speed-energy optimization of electrostatic actuators based on pull-in. J. Microelectromech. Syst. 8(3):1999;290-298. September.
4. Castañer L., Rodríguez A., Pons J., Senturia S.D. Measurement of speed-power product in electrostatic actuators. Proc. of the International Conference on Solid-State Sensors and Actuators (Transducers '99), Sendai, Japan, June. 1999;1772-1775 Institute of Electrical Engineers of Japan.
5. SaberDesigner Reference Manual. Release 4.3. 1998;Analogy, Beaverton, OR.
6. Majumder S., McGruer N.E., Zavracky P., Adams G.G., Morrison R.H., Krim J. Measurement and modelling of surface micromachined electrostatic actuators. Proc. of the International Conference on Solid-State Sensors and Actuators (Transducers '97), Chicago, June. 1997;1145-1148 IEEE.