Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

Journal of Micromechanics and Microengineering

Volumn 19, Issue 7, 2009, Pages

  Mol, L ^a   Rocha, L A ^b   Cretu, E ^c   Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b UNIVERSITY OF MINHO   (Portugal)

^c UNIVERSITY OF BRITISH COLUMBIA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING MEASUREMENTS; END EFFECTS; EXPERIMENTAL VALIDATIONS; FREE MOLECULES; INERTIA EFFECTS; KNUDSEN NUMBERS; MODIFIED REYNOLDS EQUATION; PARALLEL PLATES;

MOLECULAR DYNAMICS;

DAMPING;

EID: 68249137263     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/7/074021     Document Type: Article

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