Surface engineering and microtribology for microelectromechanical systems

Wear

Volumn 200, Issue 1-2, 1996, Pages 305-327

  Komvopoulos, K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Coatings; Fractal geometry; Microelectromechanical systems (MEMS); Microtribology; Self assembled monolayers; Stiction micromechanisms; Surface modification; Testing microstructures

Indexed keywords

ADHESION; ELECTROSTATIC COATINGS; FRACTALS; MICROMACHINING; MONOLAYERS; RELIABILITY; STIFFNESS; SURFACE PHENOMENA; SURFACE ROUGHNESS; SURFACE TREATMENT; TRIBOLOGY; VAN DER WAALS FORCES;

LIQUID MENISCUS FORMATION; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROTRIBOLOGY; SELF ASSEMBLED MONOLAYERS; SOLID BRIDGING; STICTION MICROMECHANISMS; TRIBOTESTING;

MICROELECTROMECHANICAL DEVICES;

ROUGHNESS; TRIBOLOGY;

EID: 0030435042     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(96)07328-0     Document Type: Article

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