Pull-in voltage study of electrostatically actuated fixed-fixed beams using a VLSI on-chip interconnect capacitance model

Journal of Microelectromechanical Systems

Volumn 15, Issue 3, 2006, Pages 639-651

  Chowdhury, Sazzadur ^a   Ahmadi, Majid ^a   Miller, William C ^a  

^a UNIVERSITY OF WINDSOR   (Canada)

Author keywords

Capacitance; Electrostatic; Fixed fixed beam; Fringing fields; MEMS; Pull in voltage

Indexed keywords

CAPACITANCE; FINITE ELEMENT METHOD; INTERCONNECTION NETWORKS; LSI CIRCUITS; MATHEMATICAL MODELS;

ELECTROSTATIC SPRING SOFTENING EFFECTS; ELECTROSTATICALLY ACTUATED FIXED-FIXED BEAMS; FRINGING FIELDS; HARDENING EFFECT;

ELECTROSTATIC ACTUATORS;

EID: 33745169699     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.863784     Document Type: Article

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