Modeling impact-induced failure of poly silicon MEMS: A multi-scale approach

Sensors

Volumn 9, Issue 1, 2009, Pages 556-567

  Mariani, Stefano ^a   Ghisi, Aldo ^a   Corigliano, Alberto ^a   Zerbini, Sarah ^b  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

Dynamic fracture; Impact induced failure; Inertial MEMS sensors; Multi scale FE analysis

Indexed keywords

DYNAMIC FRACTURES; FE ANALYSIS; FINITE-ELEMENT APPROACH; MEMS SENSORS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MULTI-SCALE APPROACHES; PROPAGATION OF STRESS-WAVE;

FINITE ELEMENT METHOD; MEMS; MONTE CARLO METHODS; POLYSILICON; SENSORS;

FRACTURE;

EID: 59249084181     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s90100556     Document Type: Article

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