Squeeze film air damping in MEMS

Sensors and Actuators, A: Physical

Volumn 136, Issue 1, 2007, Pages 3-27

  Bao, Minhang ^a   Yang, Heng ^b  

^a FUDAN UNIVERSITY   (China)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

Simulation; Squeeze film air damping: Reynolds equation

Indexed keywords

DAMPING; MICROSENSORS; MICROSTRUCTURE; MIRRORS; REYNOLDS EQUATION;

PARALLEL PLATE PROBLEMS; SQUEEZE FILM AIR DAMPING; TORSION MIRRORS;

MEMS;

EID: 34247156100     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.01.008     Document Type: Review

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