Squeeze film damping in the free molecular flow regime with full thermal accommodation

Sensors and Actuators, A: Physical

Volumn 156, Issue 1, 2009, Pages 171-179

  Suijlen, M A G ^a   Koning, J J ^b   van Gils, M A J ^b   Beijerinck, H C W ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NXP SEMICONDUCTORS   (Netherlands)

Author keywords

Brownian motion; Diffusion time; Free molecular flow; Kinetic damping; MEMS oscillator; Monte Carlo simulation; Random walk; Resonator mode shape; Squeeze film damping; Squeeze film frequency shift

Indexed keywords

BROWNIAN MOTION; DIFFUSION TIME; FREQUENCY SHIFT; MEMS OSCILLATORS; MONTE CARLO SIMULATION; RANDOM WALK; RESONATOR MODE; SQUEEZE FILMS; SQUEEZE-FILM DAMPING;

BALLISTICS; BROWNIAN MOVEMENT; DAMPING; DIFFUSION; FLOW SIMULATION; FREQUENCY SHIFT KEYING; KINETIC THEORY; MEMS; MONTE CARLO METHODS; RESONANCE; RESONATORS; SIMULATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 71649099282     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.03.025     Document Type: Article

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