Independent tuning of linear and nonlinear stiffness coefficients

Journal of Microelectromechanical Systems

Volumn 7, Issue 2, 1998, Pages 172-180

  Adams, Scott G ^b,c,d,e   Bertsch, Fred M ^c   Shaw, Kevin A ^b,c,f   MacDonald, Noel C ^a,c,e,g,h,i  

^a IEEE

^b TMS Technologies Inc   (United States)

^c Department of Obstetrics Gynecology   (United States)

^d Advanced Design Engineering Group   (United States)

^e Cornell University   (United States)

^f UNIVERSITY OF CALIFORNIA   (United States)

^g UNIVERSITY OF CALIFORNIA   (United States)

^h ROCKWELL SCIENCE CENTER   (United States)

ⁱ Natl Nanofabrication Users Network   (United States)

Author keywords

Actuators; Capacitance; Electrostatic; Stiffness; Tuning

Indexed keywords

ACTUATORS; CAPACITANCE; ELECTROSTATIC DEVICES; NATURAL FREQUENCIES; NUMERICAL ANALYSIS; OSCILLATORS (MECHANICAL); STIFFNESS; TUNING;

ELECTROSTATIC TUNING ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032099254     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.679344     Document Type: Article

References (14)

1. J. S. Yao and N. C. MacDonald, "A micromachined, single-crystal silicon, tunable resonator," J. Micromech. Microeng., vol. 5, pp. 257-264, 1995.
2. F. C. Moon and Y. H. Pao, "Magnetoelastic vibrations and instability of a plate in a transverse magnetic field," J. App. Mech., Mar. 1969.
3. F. C. Moon, "The buckling of dielectric fibers in an electric field," Lett. Appl. Eng. Sci., vol. 1, pp. 327-336, 1973.
4. H. H. Woodson and J. R. Melcher, Electromechanical Dynamics, Part III: Elastic and Fluid Media. Malabar, FL: Krieger, 1968.
5. C. T.-C. Nguyen and R. T. Howe, "Microresonator frequency control and stabilization using an integrated micro oven," in 7th Int. Conf. Solid-State Sensors and Actuators, (Transducers'93), pp. 1040-1043.
6. S. G. Adams, F. M. Bertsch, K. A. Shaw, P. G. Hartwell, N. C. MacDonald, and F. C. Moon, "Capacitance based tunable micromechanical resonators," in 8th Int. Conf. Solid-State Sensors and Actuators, (Transducers'95), Stockholm, Sweden, vol. 1, pp. 438-441.
7. C. T.-C. Nguyen and R. T. Howe, "Design and performance of CMOS micromechanical resonator oscillators," in IEEE Proc. 1994 Int. Frequency Control Symp., Boston, MA, 1994, pp. 127-34.
8. L. S. Fan and L. Crawforth, "Spring-softening effect in MEMS microstructures," in 7th Int. Conf. Solid-State Sensors and Actuators, (Transducers'93), pp. 767-769.
9. K. A. Shaw, Z. L. Zhang, and N. C. MacDonald, "SCREAM i: A single mask, single-crystal silicon process for microelectromechanical structures," Sens. Actuators A, vol. 40, pp. 63-70, 1994.
10. S. G. Adams, C. Y. Hui, and N. C. MacDonald, "Simulation of micro electro mechanical systems using a hybrid BEM/FEM code with application to the stability analysis of a tunable oscillator," in 1995 Int. Mechanical Engineering Congress and Exposition (IMECE'95): Symp. Micro-Mechanical Syst., pp. 931-940.
11. M. D. Greenberg, Foundations of Applied Mathematics. London, U.K.: Prentice-Hall, 1978.
12. J. D. Zook, D. W. Burns, H. Guckel, J. J. Sniegoski, R. L. Engelstad, and Z. Feng, "Resonant microbeam strain transducers," in 6th Int. Conf. Solid-State Sensors and Actuators, (Transducers'91), San Francisco, CA, pp. 529-532.
13. R. I. Pratt et. al., "Micromechanical structures for thin film characterization," in 7th Int. Conf. Solid-State Sensors and Actuators, (Transducers'93), pp. 205-208.
14. D. W. Jordan and P. Smith, Nonlinear Ordinary Differential Equations. Oxford, U.K.: Clarendon, 1987.