An efficient numerical technique for electromechanical simulation of complicated microelectromechanical structures

Sensors and Actuators, A: Physical

Volumn 58, Issue 1, 1997, Pages 1-11

  Aluru, N R ^a   White, J ^a  

^a USA   (United States)

Author keywords

Electromechanical simulations; Microelectromechanical systems; Numerical techniques

Indexed keywords

ALGORITHMS; BOUNDARY ELEMENT METHOD; COMPUTER SIMULATION; FINITE ELEMENT METHOD; NONLINEAR EQUATIONS; NUMERICAL METHODS; THREE DIMENSIONAL;

ELECTROMECHANICAL SIMULATION; NEWTON-GMRES TECHNIQUE;

MICROELECTROMECHANICAL DEVICES;

EID: 0030653833     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80218-X     Document Type: Article

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