Helium ion microscopy

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 32, Issue 2, 2014, Pages

  Hlawacek, Gregor ^a   Veligura, Vasilisa ^a   Van Gastel, Raoul ^a   Poelsema, Bene ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ION SOURCES; GAS INDUSTRY; NANOTECHNOLOGY; NATURAL GAS FIELDS;

ENABLING TECHNOLOGIES; GAS FIELD ION SOURCES; HELIUM ION; HELIUM ION MICROSCOPIES; LENGTH SCALE; MATERIAL REMOVAL; NANOFABRICATION TECHNIQUES; ULTRA-HIGH RESOLUTION MICROSCOPY;

GAS INDUSTRY; HELIUM;

EID: 84898986868     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.4863676     Document Type: Article

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