Helium ion microscopy of graphene: Beam damage, image quality and edge contrast

Nanotechnology

Volumn 24, Issue 33, 2013, Pages

  Fox, D ^a   Zhou, Y B ^a   O'Neill, A ^a   Kumar, S ^a   Wang, J J ^a   Coleman, J N ^a   Duesberg, G S ^a   Donegan, J F ^a   Zhang, H Z ^a  

^a TRINITY COLLEGE DUBLIN   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

DIMENSIONAL METROLOGY; EDGE SENSITIVITY; HELIUM ION MICROSCOPE (HIM); HELIUM ION MICROSCOPIES; HIGH MAGNIFICATIONS; IMAGING FEATURES; SCANNING ELECTRON MICROSCOPE; TRANSMISSION ELECTRON MICROSCOPE;

IMAGE QUALITY; ION MICROSCOPES; IONS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

GRAPHENE;

EID: 84881136783     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/24/33/335702     Document Type: Article

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