Local modification of magnetic anisotropy and ion milling of Co/Pt multilayers using a He+ ion beam microscope

Journal of Physics D: Applied Physics

Volumn 46, Issue 19, 2013, Pages

  Fowley, C ^a,b   Diao, Z ^b,c   Faulkner, C C ^b   Kally, J ^b   Ackland, K ^b   Behan, G ^b   Zhang, H Z ^b   Deac, A M ^a   Coey, J M D ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b TRINITY COLLEGE DUBLIN   (Ireland)

^c UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CO/PT MULTILAYER; DEPOSITED ENERGY; HELIUM IRRADIATION; ION BEAM MICROSCOPE; ORDERS OF MAGNITUDE; PERPENDICULAR MAGNETIC ANISOTROPY; SPIN REORIENTATION TRANSITIONS; THIN FILM MULTILAYERS;

FILM PREPARATION; IONS; MAGNETIC ANISOTROPY; PLATINUM;

MULTILAYERS;

EID: 84876902368     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/46/19/195501     Document Type: Article

References (29)

1. Ward B, Notte J and Economou N 2006 J. Vac. Sci. Technol. B 24 2871-4
2. Chappert C et al 1998 Science 280 1919-22
3. Devolder T 2000 Phys. Rev. B 62 5794-802
4. Rettner C, Anders S, Baglin J E E, Thomson T and Terris B D 2002 Appl. Phys. Lett. 80 279-81
5. Fassbender J, Ravelosona D and Samson Y 2004 J. Phys. D: Appl. Phys. 37 R179-96
6. Stanescu D et al 2008 J. Appl. Phys. 103 07B529
7. Urbaniak M et al 2010 Phys. Rev. Lett. 105 067202
8. Devolder T and Bernas H 2010 Materials Science with Ion Beams (Topics in Applied Physics vol 116) ed H Bernas (Berlin: Springer) pp 227-54
9. Alkemade P F A and Veldhoven E 2012 Nanofabrication ed M Stepanova and S Dew (Vienna: Springer) pp 275-300
10. Maas D, Van Veldhoven E, Chen P, Sidorkin V, Salemink H, Van Der Drift E and Alkemade P 2010 Proc. SPIE 7638 763814
11. Boden S, Moktadir Z, Bagnall D, Mizuta H and Rutt H 2011 Microelectron. Eng. 88 2452
12. Bell D, Lemme M, Stern L, Williams J and Marcus C 2009 Nanotechnology 20 455301
13. Jijin Y, Ferranti D C, Stern L A, Sanford C A, Huang J, Ren Z, Qin L C and Hall A R 2011 Nanotechnology 22 285310
14. Scipioni L, Ferranti D, Smentkowski V and Potyrailo R 2010 J. Vac. Sci. Technol. B 28 C6P18-C6P23
15. Marshall M, Yang J and Ball A 2012 Scanning 34 101
16. Livengood R, Tan S, Greenzweig Y, Notte J and McVey S 2009 J. Vac. Sci. Technol. B 27 3244-9
17. Wang Y, Boden S, Bagnall D, Rutt H and de Groot C 2012 Nanotechnology 23 395302
18. Franken J, Hoeijmakers M, Lavrijsen R, Kohlhepp J, Swagten H, Koopmans B, Van Veldhoven E and Maas D 2011 J. Appl. Phys. 109 07D504
19. Carcia P, Meinhaldt A and Suna A 1985 Appl. Phys. Lett. 47 178-80
20. Carcia P 1988 J. Appl. Phys. 63 5066-73
21. Zhang S 1995 Phys. Rev. B 51 3632-6
22. Ziegler J available from www.srim.org
23. Fox D, Chen Y, Faulkner C C and Zhang H Z 2012 Beilstein J. Nanotechnol. 3 579
24. Bruenger W H, Torkler M, Dzionk C, Terris B D, Folks L, Weller D, Rothuizen H, Vettiger P, Stangl G and Fallmann W 2000 Microelectron. Eng. 53 605-8
25. Bruno P 1999 Phys. Rev. Lett. 83 2425-8
26. Coey J M D, Berger L and Labaye Y 2001 Phys. Rev. B 64 020407
27. Faulkner C C, Cooke M D, Allwood D A, Petit D, Atkinson D and Cowburn R P 2004 J. Appl. Phys. 95 6717-19
28. Wang D, Nordman C, Qian Z, Daughton J and Myers J 2005 J. Appl. Phys. 97 10C906
29. Ishitani T and Kaga H 1995 J. Electron Microsc. 44 331-6