Channeling in helium ion microscopy: Mapping of crystal orientation

Beilstein Journal of Nanotechnology

Volumn 3, Issue 1, 2012, Pages 501-506

  Veligura, Vasilisa ^a   Hlawacek, Gregor ^a   Van Gastel, Raoul ^a   Zandvliet, Harold J W ^a   Poelsema, Bene ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Channeling; Crystallography; Helium ion microscopy; Ion scattering

Indexed keywords

BACK-SCATTERED; BULK SAMPLES; CHANNELING; CRYSTALLOGRAPHIC INFORMATION; HELIUM ION; HIGH RESOLUTION; ION SCATTERING; MATERIALS CHARACTERIZATION; SECONDARY ELECTRON IMAGES; SIMPLE GEOMETRIC MODELS; SURFACE INFORMATION; SURFACE SENSITIVITY; THIN SURFACE LAYER;

CRYSTALLOGRAPHY; ELECTRON OPTICS; HELIUM; IONS; SECONDARY EMISSION; SURFACES;

ION MICROSCOPES;

EID: 84864309753     PISSN: None     EISSN: 21904286     Source Type: Journal    
DOI: 10.3762/bjnano.3.57     Document Type: Article

References (13)

1. Ward, B. W.; Notte, J. A.; Economou, N. P. J. Vac. Sci. Technol., B 2006, 24, 2871-2874. doi:10.1116/1.2357967
2. Hill, R.; Faridur Rahman, F. H. M. Nucl. Instrum. Methods Phys. Res., Sect. A 2011, 645, 96-101. doi:10.1016/j.nima.2010.12.123
3. Sijbrandij, S.; Notte, J.; Scipioni, L.; Huynh, C.; Sanford, C. J. Vac. Sci. Technol., B 2010, 28, 73-77. doi:10.1116/1.3271254
4. van Gastel, R.; Barriss, L.; Sanford, C.; Hlawacek, G.; Scipioni, L.; Merkle, A.; Voci, D.; Fenner, C.; Zandvliet, H.; Poelsema B. Microsc. Microanal. 2011, 17 (Suppl. S2), 928-929. doi:10.1017/S1431927611005514
5. Ziegler, J. F.; Biersack, J. P.; Ziegler, M. D. SRIM-The stopping and range of ions in matter; Lulu Press: Morrisville, NC, USA, 2008.
6. Ramachandra, R.; Griffin, B.; Joy, D. Ultramicroscopy 2009, 109, 748-757. doi:10.1016/j.ultramic.2009.01.013
7. Livengood, R.; Tan, S.; Greenzweig, Y.; Notte, J.; McVey, S. J. Vac. Sci. Technol., B 2009, 27, 3244. doi:10.1116/1.3237101
8. Lindhard, J. Mat.-Fys. Medd.-K. Dan. Vidensk. Selsk. 1965, 34, 1-64.
9. Feijen, H. H. W.; Verhey, L. K.; Boers, A. L.; Suurmeijer, E. P. T. M. J. Phys. E: Sci. Instrum. 1973, 6, 1174. doi:10.1088/0022-3735/6/12/005
10. Franklin, R. E.; Kirk, E. C. G.; Cleaver, J. R. A.; Ahmed, H. J. Mater. Sci. Lett. 1988, 7, 39-41. doi:10.1007/BF01729909
11. Levi-Setti, R. Scanning Electron Microsc. 1983, 1, 1-15.
12. MEIS - fcc(111) stereographic projection. http://www.dl.ac.uk/MEIS/stereographs/sp.fcc.111.html (accessed April 19, 2012).
13. Preuss, E.; Krahl-Urban, B.; Butz, R. Laue-Atlas: plotted Laue back-reflection patterns of the elements, the compounds RX and RX2; Bertelsmann-Universitätsverlag: Düsseldorf, 1974