-
1
-
-
0002417208
-
A fast triangle-triangle intersection test
-
Akenine-Möller T,. 1997. A fast triangle-triangle intersection test. J Graph Tools 2: 25-30.
-
(1997)
J Graph Tools
, vol.2
, pp. 25-30
-
-
Akenine-Möller, T.1
-
2
-
-
33845244377
-
Modeling of linewidth measurement in scanning electron microscopes using advanced Monte Carlo software
-
DOI 10.1116/1.2366701
-
Babin S, Borisov S, Ivanchikov A, Ruzavin I,. 2006. Modeling of linewidth measurement in sems using advanced monte carlo software. J Vac Sci Technol B 24: 3121-3124. (Pubitemid 44866479)
-
(2006)
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
, vol.24
, Issue.6
, pp. 3121-3124
-
-
Babin, S.1
Borisov, S.2
Ivanchikov, A.3
Ruzavin, I.4
-
4
-
-
79451473493
-
Simulating STEM imaging of nanoparticles in micrometers-thick substrates
-
Demers H, Poirier-Demers N, Drouin D, de Jonge N,. 2010. Simulating STEM imaging of nanoparticles in micrometers-thick substrates. Microsc Microanal 16: 795-804.
-
(2010)
Microsc Microanal
, vol.16
, pp. 795-804
-
-
Demers, H.1
Poirier-Demers, N.2
Drouin, D.3
De Jonge, N.4
-
5
-
-
28744451904
-
Application of Monte Carlo simulation to SEM image contrast of complex structures
-
DOI 10.1002/sia.2109
-
Ding ZJ, Li HM,. 2005. Application of Monte Carlo simulation to SEM image contrast of complex structures. Surf Interface Anal 37: 912-918. (Pubitemid 41755707)
-
(2005)
Surface and Interface Analysis
, vol.37
, Issue.11
, pp. 912-918
-
-
Ding, Z.J.1
Li, H.M.2
-
6
-
-
34250679310
-
CASINO V2.42 - A fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users
-
DOI 10.1002/sca.20000
-
Drouin D, Couture AR, Joly D, Tastet X, Aimez V, Gauvin R,. 2007. CASINO V2.42-a fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users. Scanning 29: 92-101. (Pubitemid 46944994)
-
(2007)
Scanning
, vol.29
, Issue.3
, pp. 92-101
-
-
Drouin, D.1
Couture, A.R.2
Joly, D.3
Tastet, X.4
Aimez, V.5
Gauvin, R.6
-
7
-
-
40349102379
-
Theory experiment comparison of the electron backscattering factor from solids at low electron energy (250-5,000 eV)
-
DOI 10.1002/sca.20091
-
El Gomati MM, Walker CGH, Assa'd AMD, Zadrazil M,. 2008. Theory experiment comparison of the electron backscattering factor from solids at low electron energy (250-5,000 eV). Scanning 30: 2-15. (Pubitemid 351342006)
-
(2008)
Scanning
, vol.30
, Issue.1
, pp. 2-15
-
-
El Gomati, M.M.1
Walker, C.G.H.2
Assa'd, A.M.D.3
Zadrazil, M.4
-
8
-
-
69949154182
-
MC X-ray, a new Monte Carlo program for quantitative x-ray microanalysis of real materials
-
Gauvin R, Michaud P,. 2009. MC X-ray, a new Monte Carlo program for quantitative x-ray microanalysis of real materials. Microsc Microanal 15: 488-489.
-
(2009)
Microsc Microanal
, vol.15
, pp. 488-489
-
-
Gauvin, R.1
Michaud, P.2
-
9
-
-
67651062629
-
MCSEM-a modular Monte Carlo simulation program for various applications in SEM metrology and SEM photogrammetry
-
Martina Luysberg K.T., Weirich T., editors. 1-5 September 2008, Aachen, Germany. Springer: Berlin Heidelberg
-
Gnieser D, Frase CG, Bosse H, Tutsch R,. 2008. MCSEM-a modular Monte Carlo simulation program for various applications in SEM metrology and SEM photogrammetry. In:, Martina Luysberg KT, Weirich T, editors. EMC 2008 14th European Microscopy Congress 1-5 September 2008, Aachen, Germany. Springer: Berlin Heidelberg. p 549-550.
-
(2008)
EMC 2008 14th European Microscopy Congress
, pp. 549-550
-
-
Gnieser, D.1
Frase, C.G.2
Bosse, H.3
Tutsch, R.4
-
10
-
-
0003539132
-
-
New York: Plenum Press
-
Goldstein JI, Newbury DE, Echlin P, Joy DC, Romig JAD, Lyman CE, Fiori C, Lifshin E,. 1992. Scanning electron microscopy and x-ray microanalysis: a text for biologists, materials scientists, and geologists. New York: Plenum Press.
-
(1992)
Scanning Electron Microscopy and X-ray Microanalysis: A Text for Biologists, Materials Scientists, and Geologists
-
-
Goldstein, J.I.1
Newbury, D.E.2
Echlin, P.3
Joy, D.C.4
Romig, J.A.D.5
Lyman, C.E.6
Fiori, C.7
Lifshin, E.8
-
11
-
-
0031396387
-
CASINO: A new Monte Carlo code in C language for electron beam interaction - Part I: Description of the program
-
Hovington P, Drouin D, Gauvin R,. 1997. CASINO: a new Monte Carlo code in C language for electron beam interaction-Part I: description of the program. Scanning 19: 1-14. (Pubitemid 28292918)
-
(1997)
Scanning
, vol.19
, Issue.1
, pp. 1-14
-
-
Hovington, P.1
Drouin, D.2
Gauvin, R.3
-
13
-
-
79958032093
-
SEM image modeling using the modular Monte Carlo model MCSEM
-
San Jose, California, USA
-
Johnsen K-P, Frase CG, Bosse H, Gnieser D,. 2010. SEM image modeling using the modular Monte Carlo model MCSEM. Proceedings of SPIE, San Jose, California, USA. Vol. 7638.76381O p.
-
(2010)
Proceedings of SPIE
, vol.7638
-
-
Johnsen, K.-P.1
Frase, C.G.2
Bosse, H.3
Gnieser, D.4
-
14
-
-
0028786942
-
A database of electron-solid interactions
-
Joy DC,. 1995a. A database of electron-solid interactions. Scanning 17: 270-275.
-
(1995)
Scanning
, vol.17
, pp. 270-275
-
-
Joy, D.C.1
-
16
-
-
84984051858
-
An empirical stopping power relationship for low-energy electrons
-
Joy DC, Luo S,. 1989. An empirical stopping power relationship for low-energy electrons. Scanning 11: 176-180.
-
(1989)
Scanning
, vol.11
, pp. 176-180
-
-
Joy, D.C.1
Luo, S.2
-
17
-
-
58149311228
-
Refinement of Monte Carlo simulations of electron-specimen interaction in low-voltage SEM
-
Kieft E, Bosch E,. 2008. Refinement of Monte Carlo simulations of electron-specimen interaction in low-voltage SEM. J Phys D Appl Phys 41: 215310.
-
(2008)
J Phys D Appl Phys
, vol.41
, pp. 215310
-
-
Kieft, E.1
Bosch, E.2
-
18
-
-
0000060066
-
A simulation of electron scattering in metals
-
Kotera M, Ijichi R, Fujiwara T, Suga H, Wittry DB,. 1990. A simulation of electron scattering in metals. Jpn J Appl Phys 29: 2277-2282.
-
(1990)
Jpn J Appl Phys
, vol.29
, pp. 2277-2282
-
-
Kotera, M.1
Ijichi, R.2
Fujiwara, T.3
Suga, H.4
Wittry, D.B.5
-
19
-
-
0028784821
-
Use of Monte Carlo modeling for interpreting scanning electron microscope linewidth measurements
-
Lowney JR,. 1995. Use of Monte Carlo modeling for interpreting scanning electron microscope linewidth measurements. Scanning 5: 281-286.
-
(1995)
Scanning
, vol.5
, pp. 281-286
-
-
Lowney, J.R.1
-
20
-
-
0030317842
-
Monte Carlo simulation of scanning electron microscope signals for lithographic metrology
-
Lowney JR,. 1996. Monte Carlo simulation of scanning electron microscope signals for lithographic metrology. Scanning 18: 301-306.
-
(1996)
Scanning
, vol.18
, pp. 301-306
-
-
Lowney, J.R.1
-
22
-
-
3643105693
-
Studies of the distribution of signals in the SEM/EPMA by Monte Carlo electron trajectory calculations: An outline
-
Heinrich K.F.J., Newbury D.E., Yakowitz H., editors.; October 1-3. National Bureau of Standards
-
Newbury DE, Yakowitz H,. 1976. Studies of the distribution of signals in the SEM/EPMA by Monte Carlo electron trajectory calculations: an outline. In:, Heinrich KFJ, Newbury DE, Yakowitz H, editors. NBS Special Publication; October 1-3. National Bureau of Standards. p 15-44.
-
(1976)
NBS Special Publication
, pp. 15-44
-
-
Newbury, D.E.1
Yakowitz, H.2
-
24
-
-
28744451869
-
A new Monte Carlo application for complex sample geometries
-
DOI 10.1002/sia.2093
-
Ritchie NWM,. 2005. A new Monte Carlo application for complex sample geometries. Surf Interface Anal 37: 1006-1011. (Pubitemid 41755719)
-
(2005)
Surface and Interface Analysis
, vol.37
, Issue.11
, pp. 1006-1011
-
-
Ritchie, N.W.M.1
-
25
-
-
11144223234
-
Elsepa - Dirac partial-wave calculation of elastic scattering of electrons and positrons by atoms, positive ions and molecules
-
DOI 10.1016/j.cpc.2004.09.006, PII S0010465504004795
-
Salvat F, Jablonski A, Powell CJ,. 2005. ELSEPA-Dirac partial-wave calculation of elastic scattering of electrons and positrons by atoms, positive ions and molecules. Comput Phys Commun 165: 157-190. (Pubitemid 40049461)
-
(2005)
Computer Physics Communications
, vol.165
, Issue.2
, pp. 157-190
-
-
Salvat, F.1
Jablonski, A.2
Powell, C.J.3
-
26
-
-
0003797116
-
-
Facultat de Fisica (ECM), Universitat de Barcelona, Spain, Nuclear Energy Agency
-
Salvat F, Fernandez-Varea JM, Sempau J,. 2006. PENELOPE-2006-a code system for Monte Carlo simulation of electron and photon transport. Facultat de Fisica (ECM), Universitat de Barcelona, Spain, Nuclear Energy Agency.
-
(2006)
PENELOPE-2006-a code system for Monte Carlo simulation of electron and photon transport
-
-
Salvat, F.1
Fernandez-Varea, J.M.2
Sempau, J.3
-
27
-
-
80055120184
-
Sensitivity of scanning electron microscope width measurements to model assumptions
-
Villarrubia JS, Ding ZJ,. 2009. Sensitivity of scanning electron microscope width measurements to model assumptions. J Micro/Nanolith MEM 8:033003-033011.
-
(2009)
J Micro/Nanolith MEM
, vol.8
, pp. 033003-033011
-
-
Villarrubia, J.S.1
Ding, Z.J.2
-
28
-
-
35148846390
-
Monte Carlo modeling of secondary electron imaging in three dimensions
-
San Jose, California, USA
-
Villarrubia JS, Ritchie NWM, Lowney JR,. 2007. Monte Carlo modeling of secondary electron imaging in three dimensions. Proceedings of SPIE, Vol. 6518. San Jose, California, USA. p 65180K-1-65180K-14.
-
(2007)
Proceedings of SPIE
, vol.6518
-
-
Villarrubia, J.S.1
Ritchie, N.W.M.2
Lowney, J.R.3
-
29
-
-
0031739473
-
Mc3D: A three-dimensional Monte Carlo system simulating image contrast in surface analytical scanning electron microscopy I - Object-oriented software design and tests
-
Yan H, Gomati MME, Prutton M, Wilkinson DK, Chu DP, Dowsett MG,. 1998. Mc3D: a three-dimensional monte carlo system simulation image contrast in surface analytical scanning electron microscopy. I-object-oriented software design and tests. Scanning 20: 465-484. (Pubitemid 28516652)
-
(1998)
Scanning
, vol.20
, Issue.6
, pp. 465-484
-
-
Yan, H.1
El Gomati, M.M.2
Prutton, M.3
Wilkinson, D.K.4
Chu, D.P.5
Dowsett, M.G.6
|