메뉴 건너뛰기




Volumn 33, Issue 3, 2011, Pages 135-146

Three-dimensional electron microscopy simulation with the CASINO Monte Carlo software

Author keywords

Monte Carlo simulation; scanning electron microscopy; scanning transmission electron microscopy; secondary electron; three dimensional (3D)

Indexed keywords

MONTE CARLO SIMULATION; SCANNING ELECTRONS; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SECONDARY ELECTRONS; THREE-DIMENSIONAL (3D);

EID: 79960720682     PISSN: 01610457     EISSN: 19328745     Source Type: Journal    
DOI: 10.1002/sca.20262     Document Type: Article
Times cited : (300)

References (29)
  • 1
    • 0002417208 scopus 로고    scopus 로고
    • A fast triangle-triangle intersection test
    • Akenine-Möller T,. 1997. A fast triangle-triangle intersection test. J Graph Tools 2: 25-30.
    • (1997) J Graph Tools , vol.2 , pp. 25-30
    • Akenine-Möller, T.1
  • 4
    • 79451473493 scopus 로고    scopus 로고
    • Simulating STEM imaging of nanoparticles in micrometers-thick substrates
    • Demers H, Poirier-Demers N, Drouin D, de Jonge N,. 2010. Simulating STEM imaging of nanoparticles in micrometers-thick substrates. Microsc Microanal 16: 795-804.
    • (2010) Microsc Microanal , vol.16 , pp. 795-804
    • Demers, H.1    Poirier-Demers, N.2    Drouin, D.3    De Jonge, N.4
  • 5
    • 28744451904 scopus 로고    scopus 로고
    • Application of Monte Carlo simulation to SEM image contrast of complex structures
    • DOI 10.1002/sia.2109
    • Ding ZJ, Li HM,. 2005. Application of Monte Carlo simulation to SEM image contrast of complex structures. Surf Interface Anal 37: 912-918. (Pubitemid 41755707)
    • (2005) Surface and Interface Analysis , vol.37 , Issue.11 , pp. 912-918
    • Ding, Z.J.1    Li, H.M.2
  • 6
    • 34250679310 scopus 로고    scopus 로고
    • CASINO V2.42 - A fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users
    • DOI 10.1002/sca.20000
    • Drouin D, Couture AR, Joly D, Tastet X, Aimez V, Gauvin R,. 2007. CASINO V2.42-a fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users. Scanning 29: 92-101. (Pubitemid 46944994)
    • (2007) Scanning , vol.29 , Issue.3 , pp. 92-101
    • Drouin, D.1    Couture, A.R.2    Joly, D.3    Tastet, X.4    Aimez, V.5    Gauvin, R.6
  • 7
    • 40349102379 scopus 로고    scopus 로고
    • Theory experiment comparison of the electron backscattering factor from solids at low electron energy (250-5,000 eV)
    • DOI 10.1002/sca.20091
    • El Gomati MM, Walker CGH, Assa'd AMD, Zadrazil M,. 2008. Theory experiment comparison of the electron backscattering factor from solids at low electron energy (250-5,000 eV). Scanning 30: 2-15. (Pubitemid 351342006)
    • (2008) Scanning , vol.30 , Issue.1 , pp. 2-15
    • El Gomati, M.M.1    Walker, C.G.H.2    Assa'd, A.M.D.3    Zadrazil, M.4
  • 8
    • 69949154182 scopus 로고    scopus 로고
    • MC X-ray, a new Monte Carlo program for quantitative x-ray microanalysis of real materials
    • Gauvin R, Michaud P,. 2009. MC X-ray, a new Monte Carlo program for quantitative x-ray microanalysis of real materials. Microsc Microanal 15: 488-489.
    • (2009) Microsc Microanal , vol.15 , pp. 488-489
    • Gauvin, R.1    Michaud, P.2
  • 9
    • 67651062629 scopus 로고    scopus 로고
    • MCSEM-a modular Monte Carlo simulation program for various applications in SEM metrology and SEM photogrammetry
    • Martina Luysberg K.T., Weirich T., editors. 1-5 September 2008, Aachen, Germany. Springer: Berlin Heidelberg
    • Gnieser D, Frase CG, Bosse H, Tutsch R,. 2008. MCSEM-a modular Monte Carlo simulation program for various applications in SEM metrology and SEM photogrammetry. In:, Martina Luysberg KT, Weirich T, editors. EMC 2008 14th European Microscopy Congress 1-5 September 2008, Aachen, Germany. Springer: Berlin Heidelberg. p 549-550.
    • (2008) EMC 2008 14th European Microscopy Congress , pp. 549-550
    • Gnieser, D.1    Frase, C.G.2    Bosse, H.3    Tutsch, R.4
  • 11
    • 0031396387 scopus 로고    scopus 로고
    • CASINO: A new Monte Carlo code in C language for electron beam interaction - Part I: Description of the program
    • Hovington P, Drouin D, Gauvin R,. 1997. CASINO: a new Monte Carlo code in C language for electron beam interaction-Part I: description of the program. Scanning 19: 1-14. (Pubitemid 28292918)
    • (1997) Scanning , vol.19 , Issue.1 , pp. 1-14
    • Hovington, P.1    Drouin, D.2    Gauvin, R.3
  • 13
    • 79958032093 scopus 로고    scopus 로고
    • SEM image modeling using the modular Monte Carlo model MCSEM
    • San Jose, California, USA
    • Johnsen K-P, Frase CG, Bosse H, Gnieser D,. 2010. SEM image modeling using the modular Monte Carlo model MCSEM. Proceedings of SPIE, San Jose, California, USA. Vol. 7638.76381O p.
    • (2010) Proceedings of SPIE , vol.7638
    • Johnsen, K.-P.1    Frase, C.G.2    Bosse, H.3    Gnieser, D.4
  • 14
    • 0028786942 scopus 로고
    • A database of electron-solid interactions
    • Joy DC,. 1995a. A database of electron-solid interactions. Scanning 17: 270-275.
    • (1995) Scanning , vol.17 , pp. 270-275
    • Joy, D.C.1
  • 16
    • 84984051858 scopus 로고
    • An empirical stopping power relationship for low-energy electrons
    • Joy DC, Luo S,. 1989. An empirical stopping power relationship for low-energy electrons. Scanning 11: 176-180.
    • (1989) Scanning , vol.11 , pp. 176-180
    • Joy, D.C.1    Luo, S.2
  • 17
    • 58149311228 scopus 로고    scopus 로고
    • Refinement of Monte Carlo simulations of electron-specimen interaction in low-voltage SEM
    • Kieft E, Bosch E,. 2008. Refinement of Monte Carlo simulations of electron-specimen interaction in low-voltage SEM. J Phys D Appl Phys 41: 215310.
    • (2008) J Phys D Appl Phys , vol.41 , pp. 215310
    • Kieft, E.1    Bosch, E.2
  • 19
    • 0028784821 scopus 로고
    • Use of Monte Carlo modeling for interpreting scanning electron microscope linewidth measurements
    • Lowney JR,. 1995. Use of Monte Carlo modeling for interpreting scanning electron microscope linewidth measurements. Scanning 5: 281-286.
    • (1995) Scanning , vol.5 , pp. 281-286
    • Lowney, J.R.1
  • 20
    • 0030317842 scopus 로고    scopus 로고
    • Monte Carlo simulation of scanning electron microscope signals for lithographic metrology
    • Lowney JR,. 1996. Monte Carlo simulation of scanning electron microscope signals for lithographic metrology. Scanning 18: 301-306.
    • (1996) Scanning , vol.18 , pp. 301-306
    • Lowney, J.R.1
  • 22
    • 3643105693 scopus 로고
    • Studies of the distribution of signals in the SEM/EPMA by Monte Carlo electron trajectory calculations: An outline
    • Heinrich K.F.J., Newbury D.E., Yakowitz H., editors.; October 1-3. National Bureau of Standards
    • Newbury DE, Yakowitz H,. 1976. Studies of the distribution of signals in the SEM/EPMA by Monte Carlo electron trajectory calculations: an outline. In:, Heinrich KFJ, Newbury DE, Yakowitz H, editors. NBS Special Publication; October 1-3. National Bureau of Standards. p 15-44.
    • (1976) NBS Special Publication , pp. 15-44
    • Newbury, D.E.1    Yakowitz, H.2
  • 24
    • 28744451869 scopus 로고    scopus 로고
    • A new Monte Carlo application for complex sample geometries
    • DOI 10.1002/sia.2093
    • Ritchie NWM,. 2005. A new Monte Carlo application for complex sample geometries. Surf Interface Anal 37: 1006-1011. (Pubitemid 41755719)
    • (2005) Surface and Interface Analysis , vol.37 , Issue.11 , pp. 1006-1011
    • Ritchie, N.W.M.1
  • 25
    • 11144223234 scopus 로고    scopus 로고
    • Elsepa - Dirac partial-wave calculation of elastic scattering of electrons and positrons by atoms, positive ions and molecules
    • DOI 10.1016/j.cpc.2004.09.006, PII S0010465504004795
    • Salvat F, Jablonski A, Powell CJ,. 2005. ELSEPA-Dirac partial-wave calculation of elastic scattering of electrons and positrons by atoms, positive ions and molecules. Comput Phys Commun 165: 157-190. (Pubitemid 40049461)
    • (2005) Computer Physics Communications , vol.165 , Issue.2 , pp. 157-190
    • Salvat, F.1    Jablonski, A.2    Powell, C.J.3
  • 27
    • 80055120184 scopus 로고    scopus 로고
    • Sensitivity of scanning electron microscope width measurements to model assumptions
    • Villarrubia JS, Ding ZJ,. 2009. Sensitivity of scanning electron microscope width measurements to model assumptions. J Micro/Nanolith MEM 8:033003-033011.
    • (2009) J Micro/Nanolith MEM , vol.8 , pp. 033003-033011
    • Villarrubia, J.S.1    Ding, Z.J.2
  • 28
    • 35148846390 scopus 로고    scopus 로고
    • Monte Carlo modeling of secondary electron imaging in three dimensions
    • San Jose, California, USA
    • Villarrubia JS, Ritchie NWM, Lowney JR,. 2007. Monte Carlo modeling of secondary electron imaging in three dimensions. Proceedings of SPIE, Vol. 6518. San Jose, California, USA. p 65180K-1-65180K-14.
    • (2007) Proceedings of SPIE , vol.6518
    • Villarrubia, J.S.1    Ritchie, N.W.M.2    Lowney, J.R.3
  • 29
    • 0031739473 scopus 로고    scopus 로고
    • Mc3D: A three-dimensional Monte Carlo system simulating image contrast in surface analytical scanning electron microscopy I - Object-oriented software design and tests
    • Yan H, Gomati MME, Prutton M, Wilkinson DK, Chu DP, Dowsett MG,. 1998. Mc3D: a three-dimensional monte carlo system simulation image contrast in surface analytical scanning electron microscopy. I-object-oriented software design and tests. Scanning 20: 465-484. (Pubitemid 28516652)
    • (1998) Scanning , vol.20 , Issue.6 , pp. 465-484
    • Yan, H.1    El Gomati, M.M.2    Prutton, M.3    Wilkinson, D.K.4    Chu, D.P.5    Dowsett, M.G.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.