Nano-structuring, surface and bulk modification with a focused helium ion beam

Beilstein Journal of Nanotechnology

Volumn 3, Issue 1, 2012, Pages 579-585

  Fox, Daniel ^a   Chen, Yanhui ^a   Faulkner, Colm C ^a   Zhang, Hongzhou ^a  

^a TRINITY COLLEGE DUBLIN   (Ireland)

Author keywords

EELS; EFTEM; Helium ion microscopy; Nanofabrication; TEM

Indexed keywords

BULK MODIFICATION; CROSS SECTION; EFTEM; HELIUM ION; HELIUM ION BEAMS; HIGH DOSE; HIGH INCIDENCE; IRRADIATION EXPERIMENTS; IRRADIATION PROCESS; LATERAL CONTROL; NANO-STRUCTURING; PROBE SIZE; SUBSURFACE STRUCTURES; SURFACE MATERIALS;

ELECTRON ENERGY LOSS SPECTROSCOPY; HELIUM; ION BEAMS; ION MICROSCOPES; IONS; IRRADIATION; NANOTECHNOLOGY; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY;

SURFACES;

EID: 84866154341     PISSN: None     EISSN: 21904286     Source Type: Journal    
DOI: 10.3762/bjnano.3.67     Document Type: Article

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