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Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 645, Issue 1, 2011, Pages 136-140

The neon gas field ion source - A first characterization of neon nanomachining properties

(6) Livengood, Richard H a Tan, Shida a Hallstein, Roy a Notte, John b McVey, Shawn b Faridur Rahman, F H M b

a INTEL CORPORATION (United States)

b Carl Zeiss Vision Inc USA (United States)

Author keywords

Circuit edit; FIB; Focused ion beam; GFIS; Helium ion microscope; HIM; Nano fabrication; Nanomachining

Indexed keywords

CIRCUIT EDIT; FIB; GFIS; HELIUM ION MICROSCOPE; HIM; NANOMACHINING;

CHARGED PARTICLES; FOCUSED ION BEAMS; GAS INDUSTRY; HELIUM; ION MICROSCOPES; ION SOURCES; LIQUID METALS; METAL IONS; OLIGOMERS; PARTICLE OPTICS; SPUTTERING;

NEON;

EID: 79958214007 PISSN: 01689002 EISSN: None Source Type: Journal
DOI: 10.1016/j.nima.2010.12.220 Document Type: Conference Paper

Times cited : (45)

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