Advances in helium ion microscopy

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 645, Issue 1, 2011, Pages 96-101

  Hill, R ^a   Faridur Rahman, F H M ^a  

^a Carl Zeiss Vision Inc USA   (United States)

Author keywords

Helium ion source; Image resolution; Neon ion source; Scanning helium ion microscope

Indexed keywords

DIVERSE APPLICATIONS; HELIUM ION; HIGH BRIGHTNESS; HIGH FIDELITY; HIGH-RESOLUTION IMAGING; ION BEAM INTERACTIONS; ION MICROSCOPY; ION SPECIES; MATERIAL MODIFICATIONS; NEON ION; PROBE SIZE;

HELIUM; IMAGE RESOLUTION; ION MICROSCOPES; ION SOURCES; LUMINANCE; MATERIALS SCIENCE; PROBES;

IONS;

EID: 79958200218     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2010.12.123     Document Type: Conference Paper

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