Nanofabrication with a helium ion microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7638, Issue , 2010, Pages

  Maas, Diederik ^a   Van Veldhoven, Emile ^a   Chen, Ping ^b   Sidorkin, Vadim ^b   Salemink, Huub ^b   Van Der Drift, Emile ^b   Alkemade, Paul ^b  

^a TNO   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

helium ion beam induced deposition; Helium Ion Microscopy; HIBID; HIM; lithography; nanofabrication; nanoimaging; scanning helium ion beam lithography; SHIBL

Indexed keywords

HELIUM ION BEAMS; HELIUM ION MICROSCOPY; HIBID; HIM; NANO-IMAGING; SHIBL;

BEAM PLASMA INTERACTIONS; FORWARD SCATTERING; HELIUM; HIGH RESOLUTION ELECTRON MICROSCOPY; ION BEAMS; ION BOMBARDMENT; ION MICROSCOPES; LITHOGRAPHY; PROCESS CONTROL; SECONDARY EMISSION; UNITS OF MEASUREMENT;

IONS;

EID: 77958517698     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.862438     Document Type: Conference Paper

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