Rapid and precise scanning helium ion microscope milling of solid-state nanopores for biomolecule detection

Nanotechnology

Volumn 22, Issue 28, 2011, Pages

  Yang, Jijin ^a   Ferranti, David C ^a   Stern, Lewis A ^a   Sanford, Colin A ^a   Huang, Jason ^a   Ren, Zheng ^b   Qin, Lu Chang ^b   Hall, Adam R ^c  

^a Carl Zeiss Vision Inc USA   (United States)

^b University of North Carolina at Chapel Hill   (United States)

^c UNIVERSITY OF NORTH CAROLINA AT GREENSBORO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMOLECULAR ANALYSIS; BIOMOLECULE DETECTION; ELECTRONIC NOISE; FABRICATION PROCESS; ION TRANSPORTS; SOLID-STATE NANOPORE; TRANSMISSION ELECTRON MICROSCOPE;

HELIUM; ION MICROSCOPES; MILLING (MACHINING); NANOPORES; TRANSMISSION ELECTRON MICROSCOPY;

IONS;

DNA; HELIUM; ION;

ARTICLE; CHEMISTRY; ELECTRICITY; GENETIC PROCEDURES; INSTRUMENTATION; METHODOLOGY; MICROSCOPY; MOTION; NANOPORE; ULTRASTRUCTURE;

BIOSENSING TECHNIQUES; DNA; ELECTRICITY; HELIUM; IONS; MICROSCOPY; MOTION; NANOPORES;

EID: 79959266462     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/28/285310     Document Type: Article

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