Electron-beam-induced deformations of SiO 2 nanostructures

Journal of Applied Physics

Volumn 98, Issue 1, 2005, Pages

  Storm, A J ^a   Chen, J H ^a,b   Ling, X S ^a,c   Zandbergen, H W ^a   Dekker, C ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NETHERLANDS INSTITUTE FOR METALS RESEARCH   (Netherlands)

^c BROWN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM IRRADIATION; LAPLACE PRESSURES; SILICON MEMBRANES; SILICON OXIDE;

CONTAMINATION; DEFORMATION; ELECTRODES; ELECTRON BEAMS; IRRADIATION; MATHEMATICAL MODELS; SILICA; SURFACE TENSION; TRANSMISSION ELECTRON MICROSCOPY;

NANOSTRUCTURED MATERIALS;

EID: 22944458536     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1947391     Document Type: Article

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