Fabrication of nanopores in 1 nm thick carbon nanomembranes with slow highly charged ions

Applied Physics Letters

Volumn 102, Issue 6, 2013, Pages

  Ritter, Robert ^a   Wilhelm, Richard A ^b,c   Stöger Pollach, Michael ^a   Heller, René ^b   Mücklich, Arndt ^b   Werner, Udo ^d   Vieker, Henning ^d   Beyer, André ^d   Facsko, Stefan ^b   Gölzhäuser, Armin ^d   Aumayr, Friedrich ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^c DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^d BIELEFELD UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EXPOSED TO; HIGHLY CHARGED IONS; INDIVIDUAL ION; NANOMEMBRANES; SLOW HIGHLY CHARGED IONS; UNIFORM SIZE;

CARBON; CHARGED PARTICLES; FABRICATION; NANOSTRUCTURES;

NANOPORES;

EID: 84874266867     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4792511     Document Type: Article

References (42)

1. W. Eck, A. Küller, M. Grunze, B. Völkel, and A. Gölzhäuser, Adv. Mater. 17, 2583 (2005). 10.1002/adma.200500900
2. A. Turchanin and A. Gölzhäuser, Prog. Surf. Sci. 87, 108 (2012). 10.1016/j.progsurf.2012.05.001
3. A. Turchanin, A. Beyer, C. T. Nottbohm, X. Zhang, R. Stosch, A. S. Sologubenko, J. Mayer, P. Hinze, T. Weimann, and A. Gölzhäuser, Adv. Mater. 21, 1233 (2009). 10.1002/adma.200803078
4. X. Zhang, A. Beyer, and A. Gölzhäuser, Beilstein J. Nanotechnol. 2, 826 (2011). 10.3762/bjnano.2.92
5. C. T. Nottbohm, A. Beyer, A. S. Sologubenko, I. Ennen, A. Hutten, H. Rosner, W. Eck, J. Mayer, and A. Gölzhäuser, Ultramicroscopy 108, 885 (2008). 10.1016/j.ultramic.2008.02.008
6. A. Gölzhäuser and C. Wöll, ChemPhysChem 11, 3201 (2010). 10.1002/cphc.201000488
7. A. Beyer, A. Godt, I. Amin, C. T. Nottbohm, C. Schmidt, J. Zhao, and A. Gölzhäuser, Phys. Chem. Chem. Phys. 10, 7233 (2008). 10.1039/b809787a
8. A. Turchanin, A. Tinazli, M. El-Desawy, H. Großmann, M. Schnietz, H. H. Solak, R. Tampé, and A. Gölzhäuser, Adv. Mater. 20, 471 (2008). 10.1002/adma.200702189
9. A. Biebricher, A. Paul, P. Tinnefeld, A. Gölzhäuser, and M. Sauer, J. Biotechnol. 112, 97 (2004). 10.1016/j.jbiotec.2004.03.019
10. Z. Zheng, C. T. Nottbohm, A. Turchanin, H. Muzik, A. Beyer, M. Heilemann, M. Sauer, and A. Gölzhäuser, Angew. Chem., Int. Ed. 49, 8493 (2010). 10.1002/anie.201004053
11. I. Amin, M. Steenackers, N. Zhang, A. Beyer, X. Zhang, T. Pirzer, T. Hugel, R. Jordan, and A. Gölzhäuser, Small 6, 1623 (2010). 10.1002/smll.201000448
12. I. Amin, M. Steenackers, N. Zhang, R. Schubel, A. Beyer, A. Gölzhäuser, and R. Jordan, Small 7, 683 (2011). 10.1002/smll.201001658
13. M. Schnietz, A. Turchanin, C. T. Nottbohm, A. Beyer, H. H. Solak, P. Hinze, T. Weimann, and A. Gölzhäuser, Small 5, 2651 (2009). 10.1002/smll.200901283
14. C. T. Nottbohm, A. Turchanin, A. Beyer, R. Stosch, and A. Gölzhäuser, Small 7, 874 (2011). 10.1002/smll.201001993
15. F. Aumayr, A. S. El-Said, and W. Meissl, Nucl. Instrum. Methods Phys. Res. B 266, 2729 (2008). 10.1016/j.nimb.2008.03.106
16. F. Aumayr, S. Facsko, A. S. El-Said, C. Trautmann, and M. Schleberger, J. Phys.: Condens. Matter 23, 393001 (2011). 10.1088/0953-8984/23/39/393001
17. L. Chadderton, Radiat. Meas. 36, 13 (2003). 10.1016/S1350-4487(03)00094-5
18. A. S. El-Said, R. Heller, W. Meissl, R. Ritter, S. Facsko, C. Lemell, B. Solleder, I. C. Gebeshuber, G. Betz, M. Toulemonde, W. Moller, J. Burgdörfer, and F. Aumayr, Phys. Rev. Lett. 100, 237601 (2008). 10.1103/PhysRevLett.100.237601
19. A. S. El-Said, R. A. Wilhelm, R. Heller, S. Facsko, C. Lemell, G. Wachter, J. Burgdörfer, R. Ritter, and F. Aumayr, Phys. Rev. Lett. 109, 117602 (2012). 10.1103/PhysRevLett.109.117602
20. A. S. El-Said, R. Heller, F. Aumayr, and S. Facsko, Phys. Rev. B 82, 033403 (2010). 10.1103/PhysRevB.82.033403
21. T. Peters, C. Haake, J. Hopster, V. Sokolovsky, A. Wucher, and M. Schleberger, Nucl. Instrum. Methods Phys. Res. B 267, 687 (2009). 10.1016/j.nimb.2008.11.024
22. R. Heller, S. Facsko, R. A. Wilhelm, and W. Möller, Phys. Rev. Lett. 101, 096102 (2008). 10.1103/PhysRevLett.101.096102
23. R. Ritter, R. A. Wilhelm, R. Ginzel, G. Kowarik, R. Heller, A. S. El-Said, R. M. Papaléo, W. Rupp, J. R. Crespo López-Urrutia, J. Ullrich, S. Facsko, and F. Aumayr, EPL 97, 13001 (2012). 10.1209/0295-5075/97/ 13001
24. M. Tona, H. Watanabe, S. Takahashi, N. Nakamura, N. Yoshiyasu, M. Sakurai, T. Terui, S. Mashiko, C. Yamada, and S. Ohtani, Surf. Sci. 601, 723 (2007). 10.1016/j.susc.2006.11.002
25. M. Tona, Y. Fujita, C. Yamada, and S. Ohtani, Phys. Rev. B 77, 155427 (2008). 10.1103/PhysRevB.77.155427
26. R. Ritter, G. Kowarik, W. Meissl, L. Süss, L. Maunoury, H. Lebius, C. Dufour, M. Toulemonde, and F. Aumayr, Nucl. Instrum. Methods Phys. Res. B 268, 2897 (2010). 10.1016/j.nimb.2010.04.023
27. R. Ritter, G. Kowarik, W. Meissl, A. S. El-Said, L. Maunoury, H. Lebius, C. Dufour, M. Toulemonde, and F. Aumayr, Vacuum 84, 1062 (2010). 10.1016/j.vacuum.2009.10.018
28. F. Grossmann, R. Heller, M. Kreller, U. Kentsch, S. Landgraf, V. P. Ovsyannikov, M. Schmidt, F. Ullmann, and G. Zschornack, Nucl. Instrum. Methods Phys. Res. B 256, 565 (2007). 10.1016/j.nimb.2006.11.083
29. I. Horcas, R. Fernandez, J. M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A. M. Baro, Rev. Sci. Instrum. 78, 013705 (2007). 10.1063/1.2432410
30. M. D. Abramoff, P. J. Magalhaes, and S. J. Ram, Biophoton. Int. 11, 36 (2004), available at: http://igitur-archive.library.uu.nl/med/2011-0512-200507/ ImageJ.pdf.
31. M. C. Lemme, D. C. Bell, J. R. Williams, L. A. Stern, B. W. H. Baugher, P. Jarillo-Herrero, and C. M. Marcus, ACS Nano 3, 2674 (2009). 10.1021/nn900744z
32. A. Arnau, F. Aumayr, P. M. Echenique, M. Grether, W. Heiland, J. Limburg, R. Morgenstern, P. Roncin, S. Schippers, R. Schuch, N. Stolterfoht, P. Varga, T. J. M. Zouros, and H. P. Winter, Surf. Sci. Rep. 27, 117 (1997). 10.1016/S0167-5729(97)00002-2
33. T. Schenkel, A. V. Hamza, A. V. Barnes, and D. H. Schneider, Prog. Surf. Sci. 61, 23 (1999). 10.1016/S0079-6816(99)00009-X
34. H. P. Winter and F. Aumayr, J. Phys. B 32, R39 (1999) 10.1088/0953-4075/32/7/005.
35. F. Aumayr and H. P. Winter, Philos. Trans. R. Soc. London 362, 77 (2004). 10.1098/rsta.2003.1300
36. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Matter (Pergamon, New York, 1985).
37. J. Burgdörfer, P. Lerner, and F. W. Meyer, Phys. Rev. A 44, 5674 (1991). 10.1103/PhysRevA.44.5674
38. I. S. Bitensky and E. S. Parilis, Nucl. Instrum. Methods Phys. Res. B 21, 26 (1987). 10.1016/0168-583X(87)90135-2
39. P. Stampfli, Nucl. Instrum. Methods Phys. Res. B 107, 138 (1996). 10.1016/0168-583X(96)80046-2
40. P. Stampfli and K. H. Bennemann, Appl. Phys. A 60, 191 (1995). 10.1007/BF01538245
41. T. Schenkel, A. V. Hamza, A. V. Barnes, D. H. Schneider, J. C. Banks, and B. L. Doyle, Phys. Rev. Lett. 81, 2590 (1998). 10.1103/PhysRevLett.81.2590
42. C. A. Merchant, K. Healy, M. Wanunu, V. Ray, N. Peterman, J. Bartel, M. D. Fischbein, K. Venta, Z. Luo, A. T. C. Johnson, and M. Drindic, Nano Lett. 10, 2915 (2010) 10.1021/nl101046t.