Ion-beam sculpting at nanometre length scales

Nature

Volumn 412, Issue 6843, 2001, Pages 166-169

  Li, Jiali ^a   Stein, Derek ^b   McMullan, Ciaran ^c   Branton, Daniel ^c   Aziz, Michael J ^b   Golovchenko, Jene A ^a,b  

^a Department of Physics ^*  (United States)

^b Division of Engineering and Applied Sciences   (United States)

^c HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOMETRE SCALE;

CELL MEMBRANES; DNA; ELECTRIC POTENTIAL; FABRICATION; MASKS; SPUTTERING;

ION BEAMS;

DNA; ION; NANOPARTICLE; SILICON NITRIDE;

AQUEOUS SOLUTION; ARTICLE; DEVICE; ELECTRIC POTENTIAL; GEOMETRY; MATERIALS; MECHANICS; PRIORITY JOURNAL;

BIOSENSING TECHNIQUES; DNA; FILTRATION; IONS; MEMBRANES, ARTIFICIAL; MICROCHEMISTRY; MINIATURIZATION; MODELS, CHEMICAL; SILICON COMPOUNDS;

EID: 0035849885     PISSN: 00280836     EISSN: None     Source Type: Journal    
DOI: 10.1038/35084037     Document Type: Article

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