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Ultramicroscopy

Volumn 103, Issue 1, 2005, Pages 59-66

Alloy liquid metal ion sources and their application in mass separated focused ion beams

(1) Bischoff, L a

a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

Author keywords

Alloy liquid metal ion sources; Application; Energy spread; Focused ion beam; Microstructures

Indexed keywords

FABRICATION; FOCUSING; GERMANIUM; GOLD; ION BEAMS; ION IMPLANTATION; LITHOGRAPHY; SPUTTERING; THERMAL EFFECTS;

EMITTERS; LIQUID METAL ION SOURCES (LMIS); SPUTTERING PROCESS; SUB-MICROMETER PATTERNS;

LIQUID METALS;

ALLOY; METAL ION;

CELL DENSITY; CHEMICAL STRUCTURE; CONFERENCE PAPER; ENERGY TRANSFER; ION TRANSPORT; MEMBRANE CURRENT; TEMPERATURE MEASUREMENT;

EID: 14944363283 PISSN: 03043991 EISSN: None Source Type: Journal
DOI: 10.1016/j.ultramic.2004.11.020 Document Type: Conference Paper

Times cited : (50)

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