A review of roll-to-roll nanoimprint lithography

Nanoscale Research Letters

Volumn 9, Issue 1, 2014, Pages 1-13

  Kooy, Nazrin ^a   Mohamed, Khairudin ^a   Pin, Lee Tze ^a   Guan, Ooi Su ^a  

^a SCHOOL OF PHYSICS   (Malaysia)

Author keywords

Lithography; Nanofabrication; Nanoimprint; Nanopatterning; Plate to plate; Roll to plate; Roll to roll

Indexed keywords

FLEXIBLE ELECTRONICS; LITHOGRAPHY; NANOTECHNOLOGY;

HIGH THROUGHPUT; INDUSTRIAL-SCALE APPLICATIONS; LITERATURE REVIEWS; NANO-IMPRINT; NANO-SCALE PATTERNS; NANOIMPRINT LITHOGRAPHY PROCESS; NANOPATTERNING; ROLL TO ROLL;

NANOIMPRINT LITHOGRAPHY;

EID: 84903958406     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-9-320     Document Type: Article

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