-
1
-
-
0030570065
-
Imprint lithography with 25-nanometer resolution
-
Chou S Y, Krauss P R and Renstrom P J 1996 Imprint lithography with 25-nanometer resolution Science 272 85-7 (Pubitemid 126554924)
-
(1996)
Science
, vol.272
, Issue.5258
, pp. 85-87
-
-
Chou, S.Y.1
Krauss, P.R.2
Renstrom, P.J.3
-
2
-
-
3242676271
-
Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography
-
Austin M D, Ge H, Wu W, Li M, Yu Z, Wasserman D, Lyon S A and Chou S Y 2004 Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography Appl. Phys. Lett. 84 5299-301
-
(2004)
Appl. Phys. Lett.
, vol.84
, Issue.26
, pp. 5299-5301
-
-
Austin, M.D.1
Ge, H.2
Wu, W.3
Li, M.4
Yu, Z.5
Wasserman, D.6
Lyon, S.A.7
Chou, S.Y.8
-
3
-
-
10844291014
-
Polymer imprint lithography with molecular-scale resolution
-
DOI 10.1021/nl048355u
-
Hua F et al 2004 Polymer imprint lithography with molecular-scale resolution Nano Lett. 4 2467-71 (Pubitemid 40002386)
-
(2004)
Nano Letters
, vol.4
, Issue.12
, pp. 2467-2471
-
-
Hua, F.1
Sun, Y.2
Gaur, A.3
Meitl, M.A.4
Bilhaut, L.5
Rotkina, L.6
Wang, J.7
Geil, P.8
Shim, M.9
Rogers, J.A.10
Shim, A.11
-
4
-
-
0036643561
-
Nanoimprint lithography for organic electronics
-
DOI 10.1016/S0167-9317(02)00505-1, PII S0167931702005051
-
Clavijo Cedeno C, Seekamp J, Kam A P, Hoffmann T, Zankovych S, Sotomayor Torres C M, Menozzi C, Cavallini M, Murgia M and Ruani G 2002 Nanoimprint lithography for organic electronics Microelectron. Eng. 61/62 25-31 (Pubitemid 34613344)
-
(2002)
Microelectronic Engineering
, vol.61-62
, pp. 25-31
-
-
Cedeno, C.C.1
Seekamp, J.2
Kam, A.P.3
Hoffmann, T.4
Zankovych, S.5
Torres, C.M.S.6
Menozzi, C.7
Cavallini, M.8
Murgia, M.9
Ruani, G.10
Biscarini, F.11
Behl, M.12
Zentel, R.13
Ahopelto, J.14
-
5
-
-
38049140693
-
High-throughput fabrication of organic nanowire devices with preferential internal alignment and improved performance
-
Hu Z, Muls B, Gence L, Serban D A, Hofkens J, Melinte S, Nysten B, Demoustier-Champagne S and Jonas A M 2007 High-throughput fabrication of organic nanowire devices with preferential internal alignment and improved performance Nano Lett. 7 3639-44
-
(2007)
Nano Lett.
, vol.7
, Issue.12
, pp. 3639-3644
-
-
Hu, Z.1
Muls, B.2
Gence, L.3
Serban, D.A.4
Hofkens, J.5
Melinte, S.6
Nysten, B.7
Demoustier-Champagne, S.8
Jonas, A.M.9
-
6
-
-
27544468801
-
Multilevel, room-temperature nanoimprint lithography for conjugated polymer-based photonics
-
DOI 10.1021/nl051234p
-
Mele E, Di Benedetto F, Persano L, Cingolani R and Pisignano D 2005 Multilevel, room-temperature nanoimprint lithography for conjugated polymer-based photonics Nano Lett. 5 1915-9 (Pubitemid 41546313)
-
(2005)
Nano Letters
, vol.5
, Issue.10
, pp. 1915-1919
-
-
Mele, E.1
Di Benedetto, F.2
Persano, L.3
Cingolani, R.4
Pisignano, D.5
-
7
-
-
34248397564
-
Micro- and nanopatterning techniques for organic electronic and optoelectronic systems
-
DOI 10.1021/cr050139y
-
Menard E, Meitl M A, Sun Y, Park J U, Shir D J L, Nam Y S, Jeon S and Rogers J A 2007 Micro-and nanopatterning techniques for organic electronic and optoelectronic systems Chem. Rev. 107 1117-60 (Pubitemid 46736536)
-
(2007)
Chemical Reviews
, vol.107
, Issue.4
, pp. 1117-1160
-
-
Menard, E.1
Meitl, M.A.2
Sun, Y.3
Park, J.-U.4
Shir, D.J.-L.5
Nam, Y.-S.6
Jeon, S.7
Rogers, J.A.8
-
8
-
-
25844487632
-
Nanoscale control of polymer crystallization by nanoimprint lithography
-
DOI 10.1021/nl051097w
-
Hu Z, Baralia G, Bayot V, Gohy J F and Jonas A M 2005 Nanoscale control of polymer crystallization by nanoimprint lithography Nano Lett. 5 1738-43 (Pubitemid 41396157)
-
(2005)
Nano Letters
, vol.5
, Issue.9
, pp. 1738-1743
-
-
Hu, Z.1
Baralia, G.2
Bayot, V.3
Gohy, J.-F.4
Jonas, A.M.5
-
9
-
-
34250683575
-
Localized pressure-induced ferroelectric pattern arrays of semicrystalline poly(vinylidene fluoride) by microimprinting
-
DOI 10.1002/adma.200601474
-
Kang S J, Park Y J, Hwang J Y, Jeong H J, Lee J S, Kim K J, Kim H C, Huh J and Park C 2007 Localized pressure-induced ferroelectric pattern arrays of semicrystalline poly(vinylidene fluoride) by microimprinting Adv. Mater. 19 581-6 (Pubitemid 46942319)
-
(2007)
Advanced Materials
, vol.19
, Issue.4
, pp. 581-586
-
-
Kang, S.J.1
Park, Y.J.2
Hwang, J.3
Jeong, H.J.4
Lee, J.S.5
Kim, K.J.6
Kim, H.-C.7
Huh, J.8
Park, C.9
-
10
-
-
0036873980
-
Nanoimprinting over topography and multilayer three-dimensional printing
-
Bao L R, Cheng X, Huang X D, Guo L J, Pang S W and Yee A F 2002 Nanoimprinting over topography and multilayer three-dimensional printing J. Vac. Sci. Technol. B 20 2881-6 (Pubitemid 36072526)
-
(2002)
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B MICROELECTRONICS AND NANOMETER STRUCTURES
, vol.20
, Issue.6
, pp. 2881-2886
-
-
Bao, L.-R.1
Cheng, X.2
Huang, X.D.3
Guo, L.J.4
Pang, S.W.5
Yee, A.F.6
-
11
-
-
1842639896
-
A combined-nanoimprint-and-photolithography patterning technique
-
Cheng X and Jay Guo L 2004 A combined-nanoimprint-and-photolithography patterning technique Microelectron. Eng. 71 277-82
-
(2004)
Microelectron. Eng.
, vol.71
, Issue.3-4
, pp. 277-282
-
-
Cheng, X.1
Jay Guo, L.2
-
12
-
-
0036873952
-
Reversal imprinting by transferring polymer from mold to substrate
-
Huang X D, Bao L R, Cheng X, Guo L J, Pang S W and Yee A F 2002 Reversal imprinting by transferring polymer from mold to substrate J. Vac. Sci. Technol. B 20 2872-6 (Pubitemid 36072524)
-
(2002)
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B MICROELECTRONICS AND NANOMETER STRUCTURES
, vol.20
, Issue.6
, pp. 2872-2876
-
-
Huang, X.D.1
Bao, L.-R.2
Cheng, X.3
Guo, L.J.4
Pang, S.W.5
Yee, A.F.6
-
13
-
-
0035473576
-
Polymer bonding process for nanolithography
-
DOI 10.1063/1.1406561
-
Borzenko T, Tormen M, Schmidt G, Molenkamp L W and Janssen H 2001 Polymer bonding process for nanolithography Appl. Phys. Lett. 79 2246-8 (Pubitemid 33600815)
-
(2001)
Applied Physics Letters
, vol.79
, Issue.14
, pp. 2246-2248
-
-
Borzenko, T.1
Tormen, M.2
Schmidt, G.3
Molenkamp, L.W.4
Janssen, H.5
-
15
-
-
30044447991
-
Transfer printing by kinetic control of adhesion to an elastomeric stamp
-
DOI 10.1038/nmat1532
-
Meitl M A, Zhu Z-T, Kumar V, Lee K J, Feng X, Huang Y Y, Adesida I, Nuzzo R G and Rogers J A 2006 Transfer printing by kinetic control of adhesion to an elastomeric stamp Nat. Mater. 5 33-8 (Pubitemid 43049385)
-
(2006)
Nature Materials
, vol.5
, Issue.1
, pp. 33-38
-
-
Meitl, M.A.1
Zhu, Z.-T.2
Kumar, V.3
Lee, K.J.4
Feng, X.5
Huang, Y.Y.6
Adesida, I.7
Nuzzo, R.G.8
Rogers, J.A.9
-
16
-
-
37249021075
-
Competing fracture in kinetically controlled transfer printing
-
Feng X, Meitl M A, Bowen A M, Huang Y, Nuzzo R G and Rogers J A 2007 Competing fracture in kinetically controlled transfer printing Langmuir 23 12555
-
(2007)
Langmuir
, vol.23
, Issue.25
, pp. 12555
-
-
Feng, X.1
Meitl, M.A.2
Bowen, A.M.3
Huang, Y.4
Nuzzo, R.G.5
Rogers, J.A.6
-
17
-
-
0034672078
-
High-resolution inkjet printing of all-polymer transistor circuits
-
DOI 10.1126/science.290.5499.2123
-
Sirringhaus H, Kawase T, Friend R H, Shimoda T, Inbasekaran M, Wu W and Woo E P 2000 High-resolution inkjet printing of all-polymer transistor circuits Science 290 2123-6 (Pubitemid 32001588)
-
(2000)
Science
, vol.290
, Issue.5499
, pp. 2123-2126
-
-
Sirringhaus, H.1
Kawase, T.2
Friend, R.H.3
Shimoda, T.4
Inbasekaran, M.5
Wu, W.6
Woo, E.P.7
-
18
-
-
25944464328
-
Unstable polymer bilayers. 1. Morphology of dewetting
-
Faldi A, Composto R J and Winey K I 1995 Unstable polymer bilayers. 1. Morphology of dewetting Langmuir 11 4855-61
-
(1995)
Langmuir
, vol.11
, Issue.12
, pp. 4855-4861
-
-
Faldi, A.1
Composto, R.J.2
Winey, K.I.3
-
19
-
-
4043104154
-
-
d Gennes P-G, Brochard-Wyart F and Quéré D 2004 Capillarity and Wetting Phenomena: Drops, Bubbles, Pearls, Waves (New York: Springer)
-
(2004)
Capillarity and Wetting Phenomena: Drops, Bubbles, Pearls, Waves
-
-
Gennes P -G, D.1
Brochard-Wyart, F.2
Quéré, D.3
-
20
-
-
0037290518
-
Wetting at polymer surfaces and interfaces
-
DOI 10.1016/S0079-6700(02)00080-1, PII S0079670002000801
-
Geoghegan M and Krausch G 2003 Wetting at polymer surfaces and interfaces Prog. Polym. Sci. 28 261-302 (Pubitemid 35432707)
-
(2003)
Progress in Polymer Science (Oxford)
, vol.28
, Issue.2
, pp. 261-302
-
-
Geoghegan, M.1
Krausch, G.2
-
23
-
-
0001974482
-
Dewetting of thin polymer films
-
Reiter G 1992 Dewetting of thin polymer films Phys. Rev. Lett. 68 75
-
(1992)
Phys. Rev. Lett.
, vol.68
, Issue.1
, pp. 75
-
-
Reiter, G.1
-
24
-
-
0030012755
-
Instability of thin polymer films on coated substrates: Rupture, dewetting, and drop formation
-
DOI 10.1006/jcis.1996.0133
-
Sharma A and Reiter G 1996 Instability of thin polymer films on coated substrates: rupture, dewetting, and drop formation J. Colloid Interface Sci. 178 383-99 (Pubitemid 26173971)
-
(1996)
Journal of Colloid and Interface Science
, vol.178
, Issue.2
, pp. 383-399
-
-
Sharma, A.1
Reiter, G.2
-
25
-
-
13844312612
-
Wetting morphologies at microstructured surfaces
-
DOI 10.1073/pnas.0407721102
-
Seemann R, Brinkmann M, Kramer E J, Lange F F and Lipowsky R 2005 Wetting morphologies at microstructured surfaces Proc. Natl Acad. Sci. USA 102 1848-52 (Pubitemid 40261975)
-
(2005)
Proceedings of the National Academy of Sciences of the United States of America
, vol.102
, Issue.6
, pp. 1848-1852
-
-
Seemann, R.1
Brinkmann, M.2
Kramer, E.J.3
Lange, F.F.4
Lipowsky, R.5
-
26
-
-
0036571982
-
Controlled polymer dewetting by physical confinement
-
DOI 10.1063/1.1467898
-
Suh K Y, Park J and Lee H H 2002 Controlled polymer dewetting by physical confinement J. Chem. Phys. 116 7714-8 (Pubitemid 34599084)
-
(2002)
Journal of Chemical Physics
, vol.116
, Issue.17
, pp. 7714-7718
-
-
Suh, K.Y.1
Park, J.2
Lee, H.H.3
-
27
-
-
0037025661
-
Fabricating ordered two-dimensional arrays of polymer rings with submicrometer-sized features on patterned self-assembled monolayers by dewetting
-
DOI 10.1002/1521-4095(20020805)14:15<1049::AID-ADMA1049>3.0.CO;2-#
-
Lu G, Li W, Yao J, Zhang G, Yang B and Shen J 2002 Fabricating ordered two-dimensional arrays of polymer rings with submicrometer-sized features on patterned self-assembled monolayers by dewetting Adv. Mater. 14 1049-53 (Pubitemid 34933843)
-
(2002)
Advanced Materials
, vol.14
, Issue.15
, pp. 1049-1053
-
-
Lu, G.1
Li, W.2
Yao, J.3
Zhang, G.4
Yang, B.5
Shen, J.6
-
28
-
-
0042164431
-
How to form regular polymer microstructures by surface-pattern-directed dewetting
-
Zhang Z, Wang Z, Xing R and Han Y 2003 How to form regular polymer microstructures by surface-pattern-directed dewetting Surf. Sci. 539 129-36
-
(2003)
Surf. Sci.
, vol.539
, Issue.1-3
, pp. 129-136
-
-
Zhang, Z.1
Wang, Z.2
Xing, R.3
Han, Y.4
-
29
-
-
0032947360
-
Liquid morphologies on structured surfaces: From microchannels to microchips
-
DOI 10.1126/science.283.5398.46
-
Gau H, Herminghaus S, Lenz P and Lipowsky R 1999 Liquid morphologies on structured surfaces: from microchannels to microchips Science 283 46-9 (Pubitemid 29044840)
-
(1999)
Science
, vol.283
, Issue.5398
, pp. 46-49
-
-
Gau, H.1
Herminghaus, S.2
Lenz, P.3
Lipowsky, R.4
-
30
-
-
33646066853
-
Surface structuring of textile fibers using roll embossing
-
Schift H, Halbeisen M, Schutz U, Delahoche B, Vogelsang K and Gobrecht J 2006 Surface structuring of textile fibers using roll embossing Microelectron. Eng. 83 855-8
-
(2006)
Microelectron. Eng.
, vol.83
, Issue.4-9
, pp. 855-858
-
-
Schift, H.1
Halbeisen, M.2
Schutz, U.3
Delahoche, B.4
Vogelsang, K.5
Gobrecht, J.6
-
31
-
-
33845432703
-
Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano-and micropatterns
-
Ahn S, Cha J, Myung H, Kim S-M and Kang S 2006 Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano-and micropatterns Appl. Phys. Lett. 89 213101
-
(2006)
Appl. Phys. Lett.
, vol.89
, Issue.21
, pp. 213101
-
-
Ahn, S.1
Cha, J.2
Myung, H.3
Kim, S.-M.4
Kang, S.5
|