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Volumn 86, Issue 4-6, 2009, Pages 604-607

Nanoscale patterning with the double-layered soft cylindrical stamps by means of UV-nanoimprint lithography

Author keywords

Double layered stamp; Roller type UV NIL; Soft cylindrical stamp; Stamp replication

Indexed keywords

DOUBLE-LAYERED STAMP; MINIMIZATION OF COSTS; NANO IMPRINTS; NANO-SCALE; NANO-SCALE PATTERNING; NANO-SCALE PATTERNS; PROCESS CONDITIONS; ROLLER-TYPE UV-NIL; SOFT CYLINDRICAL STAMP; STAMP REPLICATION; UV-NANOIMPRINT LITHOGRAPHIES;

EID: 67349179634     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.12.074     Document Type: Article
Times cited : (18)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.