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Volumn 86, Issue 4-6, 2009, Pages 604-607
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Nanoscale patterning with the double-layered soft cylindrical stamps by means of UV-nanoimprint lithography
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Author keywords
Double layered stamp; Roller type UV NIL; Soft cylindrical stamp; Stamp replication
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Indexed keywords
DOUBLE-LAYERED STAMP;
MINIMIZATION OF COSTS;
NANO IMPRINTS;
NANO-SCALE;
NANO-SCALE PATTERNING;
NANO-SCALE PATTERNS;
PROCESS CONDITIONS;
ROLLER-TYPE UV-NIL;
SOFT CYLINDRICAL STAMP;
STAMP REPLICATION;
UV-NANOIMPRINT LITHOGRAPHIES;
FABRICATION;
MACHINERY;
NANOSTRUCTURED MATERIALS;
ROLLERS (MACHINE COMPONENTS);
NANOIMPRINT LITHOGRAPHY;
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EID: 67349179634
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2008.12.074 Document Type: Article |
Times cited : (18)
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References (7)
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