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Volumn 47, Issue 6 PART 2, 2008, Pages 5151-5155

Quick cavity filling in UV nanoimprint using pentafluoropropane

Author keywords

Absorption; Bubble defects; Condensation; Imprint lithography; Pentafluoropropane; Stefan's equation; UV nanoimprint

Indexed keywords

ABSORPTION; MOLDS; SHRINKAGE; SPEED; VACUUM;

BUBBLE DEFECTS; IMPRINT LITHOGRAPHY; PENTAFLUOROPROPANE; STEFAN'S EQUATION; UV NANOIMPRINT;

NANOIMPRINT LITHOGRAPHY;

EID: 55049115151 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.47.5151 Document Type: Article

Times cited : (34)

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