Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol-gel relief on a metal backbone

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2113-2116

  Schleunitz, Arne ^a   Spreu, Christian ^a   Mäkelä, Tapio ^b   Haatainen, Tomi ^b   Klukowska, Anna ^c   Schift, Helmut ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^c MICRO RESIST TECHNOLOGY GMBH   (Germany)

Author keywords

Hybrid mold; Hybrid polymer; Nanoimprint lithography; Roll embossing; Sol gel material; Stamp fabrication

Indexed keywords

HYBRID MOLD; HYBRID POLYMERS; NANO-IMPRINT; ROLL EMBOSSING; SOL-GEL MATERIAL; STAMP FABRICATION;

GELS; METAL WORKING; MOLDS; NANOIMPRINT LITHOGRAPHY; PLATE METAL; SOL-GELS; SOLS;

SOL-GEL PROCESS;

EID: 79960063699     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.02.019     Document Type: Conference Paper

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