Research on the cast molding process for high quality PDMS molds

Microelectronic Engineering

Volumn 86, Issue 3, 2009, Pages 310-313

  Ye, Xiangdong ^a   Liu, Hongzhong ^a   Ding, Yucheng ^a   Li, Hansong ^a   Lu, Bingheng ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Cast molding process; Curing temperature; Nanoimprint; PDMS mold; Vacuum degree

Indexed keywords

ARSENIC; CURING; MICROCHANNELS; MOLDING; MOLDS; VACUUM;

CAST MOLDING PROCESS; CURING TEMPERATURE; NANOIMPRINT; PDMS MOLD; VACUUM DEGREE;

SILICONES;

EID: 59049108196     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.10.011     Document Type: Article

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