Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 837-842

  Beck, M ^a   Persson, F ^a   Carlberg, P ^a   Graczyk, M ^a   Maximov, I ^a   Ling, T G I ^a   Montelius, L ^a  

^a LUND UNIVERSITY   (Sweden)

Author keywords

Interdigitated array electrode; Nanoimprint lithography; Redox cycling; Sensor; Transducer

Indexed keywords

ARRAYS; CAPACITORS; CHEMICAL SENSORS; ELECTRODES; ELECTRON BEAM LITHOGRAPHY; LITHOGRAPHY; MICROPROCESSOR CHIPS; NANOTECHNOLOGY; REDOX REACTIONS; RESONATORS; SILICON COMPOUNDS; TRANSDUCERS; ULTRAVIOLET SPECTROSCOPY;

CAPACITIVE SENSORS; INTERDIGITATED ARRAY ELECTRODE (IDA); NANOIMPRINT LITHOGRAPHY (NIL); REDOX CYCLING;

ELECTROCHEMICAL SENSORS;

EID: 2542442954     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00230-8     Document Type: Conference Paper

References (15)

1. Iwasaki Y., Morita M. Current Separations. 14(1):1995;2-8.
2. Aoki K., Morita M., Niwa O., Tabei H. Journal of Electroanalytical Chemistry. 256:1988;269-282.
3. Aoki K., Tanaka M. Journal of Electroanalytical Chemistry. 266:1988;11-20.
4. Aoki K., Tokuda K., Matsuda H. Journal of Electroanalytical Chemistry. 230:1987;61-67.
5. van Gerwen P., Laureyn W., Laureys W., Huyberechts G., op de Beeck M., Baert K., Suls J., Sansen W., Jacobs P., Hermans L., Mertens R. Sensors and Actuators B. 49:1998;73-80.
6. Benes E., Gröschl M., Burger W., Schmid M. Sensors and Actuators A. 48:1995;1-21.
7. Lüdtke O., Biefeld V., Buhrdorf A., Binder J. Sensors and Actuators. 82:2000;149-154.
8. Chou Stephen Y., Krauss P.R., Renstrom P.J. Journal of Vacuum Science and Technology B. 14(6):1996;4129-4133.
9. Montelius L., Heidari B., Graczyk M., Maximov I., Sarwe E.-L., Ling T.G.I. Microelectronic Engineering. 53(1-4):2000;521-524.
10. Heyderman L.J., Schift H., David C., Gobrecht J., Schweizer T. Microelectronic Engineering. 54:2000;229-245.
11. Scheer H.-C., Schulz H., Hoffmann T., Sotomayor Torres C.M. Journal of Vacuum Science and Technology B. 16(6):1998;3917-3921.
12. Maximov I., Sarwe E.-L., Beck M., Deppert K., Graczyk M., Magnusson M.H., Montelius L. Microelectronic Engineering. 61-62:2002;449-454.
13. Beck M., Graczyk M., Maximov I., Sarwe E.-L., Ling T.G.I., Montelius L., Keil M. Microelectronic Engineering. 61-62:2002;441-448.
14. Carlberg P., Graczyk M., Sarwe E.-L., Maximov I., Beck M., Montelius L. Microelectronic Engineering. 67-68:2003;203-207.
15. Ling T.G.I., Beck M., Bunk R., Forsén E., Tegenfeldt J.O., Zakharov A.A., Montelius L. Microelectronic Engineering. 67-68:2003;887-892.