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Volumn , Issue , 2008, Pages 44-50

Reliability of GaN-based HEMT devices

Author keywords

Gallium nitride; HEMTs; Nitride devices; Reliability

Indexed keywords

CURRENT COLLAPSE; DEGRADATION MECHANISMS; HEMTS; LIFE-TESTING; PAST AND PRESENTS;

EID: 64849088886     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COMMAD.2008.4802089     Document Type: Conference Paper
Times cited : (11)

References (73)
  • 1
    • 49249095684 scopus 로고    scopus 로고
    • GaN-based RF power devices and amplifiers
    • Feb
    • U. K. Mishra, L. Shen, T. E. Kazior, and Y.-F. Wu, "GaN-based RF power devices and amplifiers," Proc. IEEE, vol. 26, pp. 287-305, Feb. 2008.
    • (2008) Proc. IEEE , vol.26 , pp. 287-305
    • Mishra, U.K.1    Shen, L.2    Kazior, T.E.3    Wu, Y.-F.4
  • 2
    • 64849114472 scopus 로고    scopus 로고
    • www.nitronex.com/
  • 3
    • 64849116867 scopus 로고    scopus 로고
    • www.rfmd.com/adocs/bf/GaN-bro.pdf
  • 4
    • 64849096565 scopus 로고    scopus 로고
    • www.eudyna.com/e/products-e/newproducts-e/gan-hemt.html
  • 5
    • 64849112952 scopus 로고    scopus 로고
    • www.hrl.com/pages/mel.html
  • 6
    • 64849086251 scopus 로고    scopus 로고
    • triquint.com/prodserv/new/index.cfm
    • triquint.com/prodserv/new/index.cfm
  • 7
    • 64849083256 scopus 로고    scopus 로고
    • www.cree.com/products/wireless-products.asp#gan
  • 8
    • 64849094365 scopus 로고    scopus 로고
    • www3.toshiba.co.jp/snis/ovs/des/micro/technical/tech20071009.htm
  • 9
    • 64849095852 scopus 로고    scopus 로고
    • www.nitronex.com/reliability.html
  • 15
    • 24144440420 scopus 로고    scopus 로고
    • A 3000 hours DC life test on AlGaN/GaN HEMT for RF and microwave applications
    • A. Sozza, C. Dua, E. Morvan, B. Grimbert, and S. L. Delage, "A 3000 hours DC life test on AlGaN/GaN HEMT for RF and microwave applications," Microelectron. Reliab., vol. 45, pp. 1617-1621, 2005.
    • (2005) Microelectron. Reliab , vol.45 , pp. 1617-1621
    • Sozza, A.1    Dua, C.2    Morvan, E.3    Grimbert, B.4    Delage, S.L.5
  • 19
    • 0032595863 scopus 로고    scopus 로고
    • Evaluation of the temperature stability of AlGaN/GaN heterostructure FETs
    • I. Daumiller, C. Kirchner, M. Kamp, K. J. Ebeling, and E. Kohn, "Evaluation of the temperature stability of AlGaN/GaN heterostructure FETs," IEEE El. Dev. Lett., vol. 20, pp. 448-450, 1999.
    • (1999) IEEE El. Dev. Lett , vol.20 , pp. 448-450
    • Daumiller, I.1    Kirchner, C.2    Kamp, M.3    Ebeling, K.J.4    Kohn, E.5
  • 21
    • 0001362105 scopus 로고    scopus 로고
    • Aging behavious of AlGaN/GaN HFETs with advanced ohmic and Schottky contacts
    • J. Hilsenbeck, E. Nebauer, J. Wiirfl, G. Trankle, and H. Obloh, "Aging behavious of AlGaN/GaN HFETs with advanced ohmic and Schottky contacts," El. Lett., vol. 36, pp. 980-981, 2000.
    • (2000) El. Lett , vol.36 , pp. 980-981
    • Hilsenbeck, J.1    Nebauer, E.2    Wiirfl, J.3    Trankle, G.4    Obloh, H.5
  • 24
    • 64249098711 scopus 로고    scopus 로고
    • Aging and stability of GaN high electron mobility transistors and light-emitting diodes with TiB2- and Ir- based contacts
    • R. Khanna, L. Stafford, L. F. Voss, S. J. Pearton, H. T. Tang, T. Anderson, S.-C. Hung, and F. Ren, "Aging and stability of GaN high electron mobility transistors and light-emitting diodes with TiB2- and Ir- based contacts," IEEE Trans. Dev. Mat. Reliab., vol. 8, pp. 272-276, 2008.
    • (2008) IEEE Trans. Dev. Mat. Reliab , vol.8 , pp. 272-276
    • Khanna, R.1    Stafford, L.2    Voss, L.F.3    Pearton, S.J.4    Tang, H.T.5    Anderson, T.6    Hung, S.-C.7    Ren, F.8
  • 26
    • 43949095851 scopus 로고    scopus 로고
    • Formation mechanism of ohmic contacts on AlGaN/GaN heterostructure: Electrical and microstructural characterizations
    • L. Wang, F. M. Mohammed, and I. Adesida, "Formation mechanism of ohmic contacts on AlGaN/GaN heterostructure: electrical and microstructural characterizations," J. Appl. Phys., vol. 103, 093516, 2008.
    • (2008) J. Appl. Phys , vol.103 , pp. 093516
    • Wang, L.1    Mohammed, F.M.2    Adesida, I.3
  • 27
    • 0032637092 scopus 로고    scopus 로고
    • Drain current compression in GaN MODFETs under large-signal modulation at microwave frequencies
    • C. Nguyen, N. X. Nguyen, and D. E. Grider, "Drain current compression in GaN MODFETs under large-signal modulation at microwave frequencies," El. Lett., vol. 35, pp. 1380-1382, 1999.
    • (1999) El. Lett , vol.35 , pp. 1380-1382
    • Nguyen, C.1    Nguyen, N.X.2    Grider, D.E.3
  • 28
    • 0000220552 scopus 로고    scopus 로고
    • Trapping effects in GaN and SiC microwave FETs
    • S. C. Binari, P. B. Klein, and T. E. Kazior, "Trapping effects in GaN and SiC microwave FETs," Proc. IEEE, vol. 90, pp. 1048-1058, 2002.
    • (2002) Proc. IEEE , vol.90 , pp. 1048-1058
    • Binari, S.C.1    Klein, P.B.2    Kazior, T.E.3
  • 30
    • 10944229027 scopus 로고    scopus 로고
    • RF reliability performance of AlGaN/GaN HEMTs on Si substrates at 10 GHz
    • D. C. Dumka, C. Lee, H. Q. Tserng and P. Saunier, "RF reliability performance of AlGaN/GaN HEMTs on Si substrates at 10 GHz," El. Lett., vol. 40, no. 24, 2004.
    • (2004) El. Lett , vol.40 , Issue.24
    • Dumka, D.C.1    Lee, C.2    Tserng, H.Q.3    Saunier, P.4
  • 31
    • 0041672337 scopus 로고    scopus 로고
    • High- field effects in silicon nitride passivated GaN MODFETs
    • D. K. Sahoo, R. K. Lal, H. Kim, V. Tilak, and L. F. Eastman, "High- field effects in silicon nitride passivated GaN MODFETs," IEEE Trans. El. Dev., vol. 50, pp. 1163-1170, 2003.
    • (2003) IEEE Trans. El. Dev , vol.50 , pp. 1163-1170
    • Sahoo, D.K.1    Lal, R.K.2    Kim, H.3    Tilak, V.4    Eastman, L.F.5
  • 34
    • 33947253517 scopus 로고    scopus 로고
    • Current collapse and high-electric field reliability of unpassivated GaN/AlGaN/GaN HEMTs
    • G. Meneghesso, F. Rampazzo, P. Kordos, G. Verzellesi, and E. Zanoni, "Current collapse and high-electric field reliability of unpassivated GaN/AlGaN/GaN HEMTs," IEEE Trans. El. Dev., vol. 53, pp. 2932-2941, 2006.
    • (2006) IEEE Trans. El. Dev , vol.53 , pp. 2932-2941
    • Meneghesso, G.1    Rampazzo, F.2    Kordos, P.3    Verzellesi, G.4    Zanoni, E.5
  • 39
    • 52949113166 scopus 로고    scopus 로고
    • High-temperature very low frequency noise-based investigation of slow transients in AlGaN/GaN MODFETs
    • P. Valizadeh, "High-temperature very low frequency noise-based investigation of slow transients in AlGaN/GaN MODFETs," IEEE Trans. Dev. Mat. Reliab., vol. 8, pp. 265-271, 2008.
    • (2008) IEEE Trans. Dev. Mat. Reliab , vol.8 , pp. 265-271
    • Valizadeh, P.1
  • 40
    • 0141905929 scopus 로고    scopus 로고
    • A study on current collapse in AlGaN/GaN HEMTs induced by bias stress
    • T. Mizutani, Y. Ohno, M. Akita, S. Kishimoto, and K. Maezawa, "A study on current collapse in AlGaN/GaN HEMTs induced by bias stress," IEEE Trans. El. Dev., vol. 50, pp. 2015-2020, 2003.
    • (2003) IEEE Trans. El. Dev , vol.50 , pp. 2015-2020
    • Mizutani, T.1    Ohno, Y.2    Akita, M.3    Kishimoto, S.4    Maezawa, K.5
  • 41
    • 0035278804 scopus 로고    scopus 로고
    • The impact of surfacte states on the DC and RF characteristics of AlGaN/GaN HFETs
    • R. Vetury, N. Q. Zhang, S. Keller, and U. K. Mishra, "The impact of surfacte states on the DC and RF characteristics of AlGaN/GaN HFETs," IEEE Trans. El. Dev., vol. 48, pp. 560-566, 2001.
    • (2001) IEEE Trans. El. Dev , vol.48 , pp. 560-566
    • Vetury, R.1    Zhang, N.Q.2    Keller, S.3    Mishra, U.K.4
  • 42
    • 0037480894 scopus 로고    scopus 로고
    • Slow transients observed in AlGaN/GaN HFETs: Effects of SiNx passivation and UV illumination
    • G. Koely, V. Tilak, L. F. Eastman, and M. G. Spencer, "Slow transients observed in AlGaN/GaN HFETs: effects of SiNx passivation and UV illumination," IEEE Trans. El. Dev., vol. 50, pp. 886-893, 2003.
    • (2003) IEEE Trans. El. Dev , vol.50 , pp. 886-893
    • Koely, G.1    Tilak, V.2    Eastman, L.F.3    Spencer, M.G.4
  • 43
    • 33750813577 scopus 로고    scopus 로고
    • Low-frequency noise- based degradation prediction of AlxGa1-xN/GaN MODFETs
    • P. Valizadeh and D. Pavlidis, "Low-frequency noise- based degradation prediction of AlxGa1-xN/GaN MODFETs," IEEE Trans. Dev. Mat. Reliab., vol. 3, pp. 479-485, 2006.
    • (2006) IEEE Trans. Dev. Mat. Reliab , vol.3 , pp. 479-485
    • Valizadeh, P.1    Pavlidis, D.2
  • 44
    • 33748177346 scopus 로고    scopus 로고
    • AlGaN/GaN HEMT reliability assessment by means of low frequency noise measurements
    • A. Sozza, A. Curutchet, C. Dua, N. Malbert, N. Labat and A. Touboul, "AlGaN/GaN HEMT reliability assessment by means of low frequency noise measurements," Microelectron. Reliab., vol. 46, pp. 1725-1730, 2006.
    • (2006) Microelectron. Reliab , vol.46 , pp. 1725-1730
    • Sozza, A.1    Curutchet, A.2    Dua, C.3    Malbert, N.4    Labat, N.5    Touboul, A.6
  • 45
    • 0033738001 scopus 로고    scopus 로고
    • The effect of surface passivation on the microwave characteristics of undoped AlGaN/GaN HEMTs
    • B. M. Green, K. K. Chu, E. M. Chumbes, J. A. Smart, J. R. Shealy, and L. F. Eastman, "The effect of surface passivation on the microwave characteristics of undoped AlGaN/GaN HEMTs," IEEE El. Dev. Lett., vol. 21, pp. 268-270, 2000.
    • (2000) IEEE El. Dev. Lett , vol.21 , pp. 268-270
    • Green, B.M.1    Chu, K.K.2    Chumbes, E.M.3    Smart, J.A.4    Shealy, J.R.5    Eastman, L.F.6
  • 46
    • 0043180473 scopus 로고    scopus 로고
    • Effect of SiN passivation and high-electric field on AlGaN- GaN HFET degradation
    • H. Kim, R. M. Thompson, V. Tilak, T. R. Prutny, J. R. Shealy, and L. F. Eastman, "Effect of SiN passivation and high-electric field on AlGaN- GaN HFET degradation," IEEE El. Dev. Lett., vol. 24, pp. 421-423, 2003.
    • (2003) IEEE El. Dev. Lett , vol.24 , pp. 421-423
    • Kim, H.1    Thompson, R.M.2    Tilak, V.3    Prutny, T.R.4    Shealy, J.R.5    Eastman, L.F.6
  • 47
    • 0037061761 scopus 로고    scopus 로고
    • Effect of surface passivation of AlGaN/GaN heterostructure field-effect transistor
    • A. V. Vertiatchikh, L. F. Eastman, W. J. Schaff and T. Prutny, "Effect of surface passivation of AlGaN/GaN heterostructure field-effect transistor," El. Lett., vol. 38, pp. 388-389, 2002.
    • (2002) El. Lett , vol.38 , pp. 388-389
    • Vertiatchikh, A.V.1    Eastman, L.F.2    Schaff, W.J.3    Prutny, T.4
  • 50
  • 51
    • 44049089981 scopus 로고    scopus 로고
    • Prepassivation surface treatment effects on pulsed and dc I-V performance of AlGaN/GaN high-electron-mobility transistors
    • D. J. Meyer, J. R. Flemish, and J. M. Redwing, "Prepassivation surface treatment effects on pulsed and dc I-V performance of AlGaN/GaN high-electron-mobility transistors," Appl. Phys. Lett., vol. 92, 193505, 2008.
    • (2008) Appl. Phys. Lett , vol.92 , pp. 193505
    • Meyer, D.J.1    Flemish, J.R.2    Redwing, J.M.3
  • 52
    • 33645532053 scopus 로고    scopus 로고
    • Ozone passivation of slow transient current collapse in AlGaN/GaN field-effect transistors: The role of threading dislocations and the passivation mechamism
    • D. W. DiSanto, H. F. Sun and C. R. Bolognesi, "Ozone passivation of slow transient current collapse in AlGaN/GaN field-effect transistors: the role of threading dislocations and the passivation mechamism," Appl. Phys. Lett., vol. 88, 013504, 2006.
    • (2006) Appl. Phys. Lett , vol.88 , pp. 013504
    • DiSanto, D.W.1    Sun, H.F.2    Bolognesi, C.R.3
  • 53
    • 18144423165 scopus 로고    scopus 로고
    • Effect of gate-source access region stress on current collapse in AlGaN/GaN HFETs
    • D. W. DiSanto and C. R. Bolognesi, "Effect of gate-source access region stress on current collapse in AlGaN/GaN HFETs," El. Lett., vol. 41, no. 8, 2005.
    • (2005) El. Lett , vol.41 , Issue.8
    • DiSanto, D.W.1    Bolognesi, C.R.2
  • 54
    • 36048932745 scopus 로고    scopus 로고
    • Impact of selective Al2O3 passivation on current collapse in AlGaN/GaN HEMTs
    • H. F. Sun and C. R. Bolognesi, "Impact of selective Al2O3 passivation on current collapse in AlGaN/GaN HEMTs," El. Lett., vol. 43, no. 23, 2007.
    • (2007) El. Lett , vol.43 , Issue.23
    • Sun, H.F.1    Bolognesi, C.R.2
  • 55
    • 34248531663 scopus 로고    scopus 로고
    • Effect of gate-source and gate- drain Si3N4 passivation on current collapse in AlGaN/GaN high-electron mobility transistors on silicon
    • S. Arulkumaran, G. I. Ng, Z. H. Liu, "Effect of gate-source and gate- drain Si3N4 passivation on current collapse in AlGaN/GaN high-electron mobility transistors on silicon," Appl. Phys. Lett., vol. 90, 173504, 2007.
    • (2007) Appl. Phys. Lett , vol.90 , pp. 173504
    • Arulkumaran, S.1    Ng, G.I.2    Liu, Z.H.3
  • 56
    • 33751517663 scopus 로고    scopus 로고
    • RF knee walkout and source access region of unpassivated HFETs
    • G. L. Bilbro and R. J. Trew, "RF knee walkout and source access region of unpassivated HFETs," El. Lett., vol. 42, no. 24, 2006.
    • (2006) El. Lett , vol.42 , Issue.24
    • Bilbro, G.L.1    Trew, R.J.2
  • 58
    • 0034825551 scopus 로고    scopus 로고
    • High breakdown voltage GaN HFET with field plate
    • J. Li, S. J. Cai, G. Z. Pan, Y. L. Chen, C. P. Wen and K. L. Wang, "High breakdown voltage GaN HFET with field plate," El. Lett., vol. 37, pp. 196-197, 2001.
    • (2001) El. Lett , vol.37 , pp. 196-197
    • Li, J.1    Cai, S.J.2    Pan, G.Z.3    Chen, Y.L.4    Wen, C.P.5    Wang, K.L.6
  • 59
    • 0035424160 scopus 로고    scopus 로고
    • Enhancement of breakdown voltage in AlGaN/GaN high electron mobility transistors using a field plate
    • S. Karmalkar and U. K. Mishra, "Enhancement of breakdown voltage in AlGaN/GaN high electron mobility transistors using a field plate," IEEE Trans. El. Dev., vol. 48, pp. 1515-1521, 2001.
    • (2001) IEEE Trans. El. Dev , vol.48 , pp. 1515-1521
    • Karmalkar, S.1    Mishra, U.K.2
  • 60
    • 10944243171 scopus 로고    scopus 로고
    • Effects of RF stress on power and pulsed IV characteristics of AlGaN/GaN HEMTs with field-plate gates
    • C. Lee, H. Tserng, L. Witkowski, P. Saunier, S. Guo, B. Albert, R. Birkhahn and G. Munns, "Effects of RF stress on power and pulsed IV characteristics of AlGaN/GaN HEMTs with field-plate gates," El. Lett., vol. 40, no. 24, 2004.
    • (2004) El. Lett , vol.40 , Issue.24
    • Lee, C.1    Tserng, H.2    Witkowski, L.3    Saunier, P.4    Guo, S.5    Albert, B.6    Birkhahn, R.7    Munns, G.8
  • 61
  • 62
    • 27144522038 scopus 로고    scopus 로고
    • Mechanism of current collapse removal in field-plated nitride HFETs
    • A. Koudymov, V. Adivarahan, J. Yang, G. Simin, and M. Asif Khan, "Mechanism of current collapse removal in field-plated nitride HFETs," IEEE El. Dev. Lett., vol. 26, pp. 704-706, 2005.
    • (2005) IEEE El. Dev. Lett , vol.26 , pp. 704-706
    • Koudymov, A.1    Adivarahan, V.2    Yang, J.3    Simin, G.4    Asif Khan, M.5
  • 67
    • 46649101091 scopus 로고    scopus 로고
    • Investigation of high-electric-field degradation effects in AlGaN/GaN HEMTs
    • M. Faqir, G. Verzellesi, G. Meneghesso, E. Zanoni, and F. Fantini, "Investigation of high-electric-field degradation effects in AlGaN/GaN HEMTs," IEEE Trans. El. Dev., vol. 55, pp. 1592-1602, 2008.
    • (2008) IEEE Trans. El. Dev , vol.55 , pp. 1592-1602
    • Faqir, M.1    Verzellesi, G.2    Meneghesso, G.3    Zanoni, E.4    Fantini, F.5
  • 70
    • 0035886086 scopus 로고    scopus 로고
    • Induced strain mechanism of current collapse in AlGaN/GaN heterostructure field-effect transistors
    • G. Simin, A. Koudymov, A. Tarakji, X. Hu, J. Yang, M. Asif Khan, M. S. Shur and R. Gaska, "Induced strain mechanism of current collapse in AlGaN/GaN heterostructure field-effect transistors," Appl. Phys. Lett., vol. 79, pp. 2651-2653, 2001.
    • (2001) Appl. Phys. Lett , vol.79 , pp. 2651-2653
    • Simin, G.1    Koudymov, A.2    Tarakji, A.3    Hu, X.4    Yang, J.5    Asif Khan, M.6    Shur, M.S.7    Gaska, R.8
  • 72
    • 46049094023 scopus 로고    scopus 로고
    • Mechanisms for electrical degradation of GaN high-electron mobility transistors
    • Tech. Dig, DOI 10.1109/IEDM.2006.346799
    • J. Joh and J. A. del Alamo, "Mechanisms for electrical degradation of GaN high-electron mobility transistors," IEEE IEDM Tech. Dig., DOI 10.1109/IEDM.2006.346799, 2006.
    • (2006) IEEE IEDM
    • Joh, J.1    del Alamo, J.A.2
  • 73
    • 41749108640 scopus 로고    scopus 로고
    • Critical voltage for electrical degradation of GaN high-electron mobility transistors
    • J. Joh and J. A. del Alamo, "Critical voltage for electrical degradation of GaN high-electron mobility transistors," IEEE El. Dev. Lett., vol. 29, pp. 287-289, 2008.
    • (2008) IEEE El. Dev. Lett , vol.29 , pp. 287-289
    • Joh, J.1    del Alamo, J.A.2


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