Electrochemical passivation of Si and SiGe surfaces

Thin Films

Volumn 29, Issue C, 2002, Pages 135-259

  Rappich, J ^a   Dittrich, Th ^b  

^a HAHN MEITNER INSTITUT   (Germany)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 34547849363     PISSN: 10794050     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1079-4050(02)80011-4     Document Type: Article

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