Ge thin film growth on Si(111) surface using hydrogen surfactant

Thin Solid Films

Volumn 369, Issue 1, 2000, Pages 25-28

  Fujino, Toshiaki ^a   Fuse, Takashi ^a   Ryu, Jeong Tak ^a   Inudzuka, Katsuhiko ^a   Nakano, Toshiaki ^a   Goto, Koji ^a   Yamazaki, Yujin ^a   Katayama, Mitsuhiro ^a   Oura, Kenjiro ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; SPECTROSCOPIC ANALYSIS; SUBSTRATES; SURFACE ACTIVE AGENTS; THIN FILMS;

COAXIAL IMPACT-COLLISION ION SCATTERING SPECTROSCOPY (CAICISS); ION SCATTERING SPECTROSCOPY; TIME-OF-FLIGHT ELASTIC RECOIL DETECTION ANALYSIS (TOF-ERDA);

SEMICONDUCTING FILMS;

EID: 0034227464     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00828-2     Document Type: Article

References (21)

1. Copel M., Reuter M.C., Kaxiras E., Tromp R.M. Phys. Rev. Lett. 63:1989;632.
2. Copel M., Reuter M.C., Horn-von Hoegen M., Tromp R.M. Phys. Rev. B. 42:1990;11682.
3. Tromp R.M., Reuter M.C. Phys. Rev. Lett. 68:1992;954.
4. Horn-von Hoegen M., Copel M., Tsang J.C., Reuter M.C., Tromp R.M. Phys. Rev. B. 50:1994;10811.
5. Horn-von Hoegen M., Mullar B.H., Al-Falou A. Phys. Rev. B. 50:1994;11640.
6. Voigtländer B., Zinner A. Surf. Sci. 351:1996;L233.
7. Sakai A., Tatsumi T. Appl. Phys. Lett. 64:1994;52.
8. Kahng S.-J., Ha Y.H., Park J.-Y., Kim S., Moon D.W., Kuk Y. Phys. Rev. Lett. 80:1998;4931.
9. Zaima S., Yasuda Y. J. Cryst. Growth. 163:1996;105.
10. Ohta G., Fukatsu S., Ebuchi Y., Hattori T., Usami N., Shiraki Y. Appl. Phys. Lett. 65:1994;2975.
11. Katayama M., Nomura E., Kanekama N., Soejima H., Aono M. Nucl. Instrum. Methods B. 33:1988;857.
12. Sumitomo K., Oura K., Katayama I., Shoji F., Hanawa T. Nucl. Instrum. Methods B. 33:1988;871.
13. Katayama M., Nakayama T., Aono M., McConville C.F. Phys. Rev. B. 54:1996;8600.
14. Katayama M., Williams R.S., Kato M., Nomura E., Aono M. Phys. Rev. Lett. 66:1991;2762.
15. Fuse T., Fujino T., Ryu J.-T., Katayama M., Oura K. Surf. Sci. 420:1999;81.
16. Fuse T., Ryu J.-T., Fujino T., Inudzuka K., Katayama M., Oura K. Jpn. J. Appl. Phys. 38:1999;1359.
17. T. Fujino, T. Fuse, E. Tazou, T. Nakano, K. Inudzuka, K. Goto, Y. Yamazaki, M. Katayama, K. Oura, Nucl. Instrum. Methods B, (in press).
18. Takahagi T., Nagai I., Ishitani A., Kuroda H., Nagasawa Y. J. Appl. Phys. 64:1988;3516.
19. Higashi G.S., Chabal Y.J., Trucks G.W., Raghavachari K. Appl. Phys. Lett. 56:1990;656.
20. Takayanagi K., Tanishiro Y., Takahashi S., Takahashi M. Surf. Sci. 164:1985;367.
21. Shigeta Y. Surf. Rev. Lett. 5:1998;865.