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Electrochemical and Solid-State Letters

Volumn 4, Issue 3, 2001, Pages

Enhanced passivation of the oxide/SiGe interface of SiGe epitaxial layers on Si by anodic oxidation

(3) Rappich, J a Sieber, I a Knippelmeyer, R b

a HAHN MEITNER INSTITUT (Germany)

b UNIVERSITY OF MÜNSTER (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; AUGER ELECTRON SPECTROSCOPY; CRYSTAL LATTICES; ELECTROCHEMISTRY; ELECTRON ENERGY LOSS SPECTROSCOPY; EPITAXIAL GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INTERFACES (MATERIALS); OXIDES; PASSIVATION; PHOTOLUMINESCENCE; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTROCHEMICAL OXIDATION; NONRADIATIVE RECOMBINATION; RAPID THERMAL OXIDATION; SILICON GERMANIUM; THERMAL OXIDATION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0035296676 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.1347816 Document Type: Article

Times cited : (9)

References (18)

1
- 0026138240
- (1991) IEEE Electron Device Lett. , vol.12 , pp. 154
- Nayak, D.K.¹ Woo, J.C.S.² Park, J.S.³ Wang, K.L.⁴ MacWilliams, K.P.⁵

2
- 0027629428
- (1993) IEEE Electron Device Lett. , vol.14 , pp. 348
- Ismail, K.¹ Rishton, S.² Chu, J.O.³ Chan, K.⁴ Meyerson, B.S.⁵

3
- 3342914379
- (1996) Solid State Phenom. , vol.47-48 , pp. 17
- König, U.¹ Hersener, J.²

4
- 0013242121
- (1989) J. Appl. Phys. , vol.65 , pp. 172
- LeGoues, F.K.¹ Rosenberg, R.² Nguyen, T.³ Himpsel, F.⁴ Meyerson, B.S.⁵

5
- 0030683305
- (1997) Mater. Res. Soc. Symp. Proc. , vol.451 , pp. 215
- Rappich, J.¹ Sieber, I.² Schöpke, A.³ Füssel, W.⁴ Glück, M.⁵ Hersener, J.⁶

6
- 0010328124
- (1993) Mater. Res. Soc. Symp. Proc. , vol.281 , pp. 485
- Chen, P.C.¹ Lin, J.Y.² Hsu, Y.J.³ Hwang, H.L.⁴

7
- 0028514990
- (1994) J. Electron. Mater. , vol.23 , pp. 883
- Caragianis, C.¹ Shigesato, Y.² Paine, D.C.³

8
- 0001042318
- and references therein
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2748
- Seck, M.¹ Devine, R.² Hernandez, C.³ Campidelli, Y.⁴ Dupuy, J.-C.⁵

9
- 21544449965
- (1991) Appl. Phys. Lett. , vol.59 , pp. 2031
- Vancuawenberghe, O.¹ Hellman, O.C.² Herbot, N.³ Tan, W.J.⁴

10
- 0027208404
- (1993) J. Electrochem. Soc. , vol.140 , pp. 188
- Mende, G.¹ Flietner, H.² Deutscher, M.³

11
- 0033749138
- (2000) Microelectron. Reliab. , vol.40 , pp. 815
- Rappich, J.¹

12
- 0032607992
- and references therein
- (1999) J. Appl. Phys. , vol.85 , pp. 4171
- Timoshenko, V.Yu.¹ Petrenko, A.B.² Stolyarov, M.N.³ Dittrich, Th.⁴ Füssel, W.⁵ Rappich, J.⁶

13
- 17144458219
- (2000) Microelectron. Reliab. , vol.40 , pp. 825
- Rappich, J.¹ Füssel, W.²

14
- 26744445785
- (1963) Phys. Rev. , vol.130 , pp. 2193
- Berreman, D.W.¹

15
- 84864384696
- (1986) IEEE J. Quantum Electron. , vol.22 , pp. 1696
- People, R.¹

16
- 0010327206
- (1992) Thin Solid Films , vol.222 , pp. 243
- Olayos, J.¹ Engvall, J.² Grimmeis, H.G.³ Kibbel, H.⁴ Kasper, E.⁵ Presting, H.⁶

17
- 0029389992
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2488
- Tilly, L.P.¹ Mooney, P.M.² Chu, J.O.³ LeGoues, F.K.⁴

18
- 0034290804
- (2000) Electrochim. Acta , vol.45 , pp. 4629
- Rappich, J.¹ Timoshenko, V.Yu.² Würz, R.³ Dittrich, Th.⁴

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