Enhanced nitrogen incorporation and improved breakdown endurance in nitrided gate oxides prepared by anodic oxidation followed by rapid thermal nitridation in N2O

Applied Physics Letters

Volumn 69, Issue 25, 1996, Pages 3875-3877

  Jeng, Ming Jer ^a   Hwu, Jenn Gwo ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000228733     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117134     Document Type: Article

References (11)

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